Graphene Boundary Control via Gas Flow Ratios

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Solution Overview

Problem

The existing methods for growing graphene are hindered by the complexity and cost of transferring graphene onto insulating substrates, which introduces defects and impurities, and lack effective control over the growth boundary, essential for improving electron mobility and electrical properties.

Innovation Solution

A method involving the use of an insulating substrate, such as h-BN, within a growth chamber where carbon source and catalytic gases are controlled to form graphene structures with specific boundary shapes through chemical vapor deposition, allowing for the adjustment and control of graphene boundaries by varying the flow rates and ratios of these gases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If graphene is grown on metal surfaces and then transferred to insulating substrates, then graphene can be prepared, but the transfer process introduces defects and impurities while increasing complexity and cost

Engineering Contradiction:
Improvegraphene qualityVSAvoidtransfer process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention extracts the graphene growth step from the traditional metal-substrate transfer process. By directly growing graphene on insulating substrates like h-BN, the patent eliminates the transfer process entirely, removing the source of defects and impurities while reducing process complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses h-BN insulating substrates as an intermediary platform that enables direct graphene growth. The h-BN surface acts as a suitable substrate that promotes high-quality graphene formation without requiring subsequent transfer steps, thus improving graphene quality while simplifying the overall process

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If graphene is grown on insulating substrates directly, then transfer process complexity is reduced, but control over growth boundary and shape is insufficient

Engineering Contradiction:
Improvegrowth process simplicityVSAvoidboundary control precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent employs parameter changes in gas flow rates and ratios during CVD growth to precisely control graphene boundary shapes. By adjusting the flow rates of carbon source gas and catalytic gas, the invention achieves controlled growth of specific boundary shapes (armchair, zigzag, mixed) while maintaining process simplicity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention introduces dynamic control of gas flow parameters during the growth process. The ability to adjust flow rates and ratios in real-time enables precise control over boundary formation, transforming a static growth process into a dynamically controllable one that achieves both simplicity and precision

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If gas flow rates are controlled to achieve specific boundary shapes, then manufacturing precision is improved, but process control complexity increases

Engineering Contradiction:
Improveboundary shape precisionVSAvoidprocess control ease
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The patent establishes specific parameter ranges for gas flow rates and ratios that correspond to different boundary shapes. By defining these parameter windows (e.g., specific flow rate ratios for armchair vs. zigzag boundaries), the invention makes precise control achievable through straightforward parameter adjustment rather than complex control mechanisms

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables precise control over graphene boundaries, simplifies the growth process, and enhances the quality of graphene, facilitating its application in electronic devices by improving electron mobility and allowing for the growth of graphene nanoribbons with specific orientations and tidy boundaries.

Implementation Method 1

forming a graphene structure having a first boundary shape on a surface of the insulating substrate through controlling a flow rate of the first reaction gas

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 2

the first reaction gas further comprises catalytic gas, and the graphene structure having the first boundary shape on the surface of the insulating substrate is formed by controlling a flow rate ratio of the catalytic gas to the carbon source gas

Methodology Applied
Scientific EffectCatalysis: Catalysis

Data Source

PatentUS10928304B2Method for adjusting and controlling boundary of graphene
Publication Date: 2021.02.23 SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
  • US10928304B2 patent drawing
  • US10928304B2 patent drawing
  • US10928304B2 patent drawing

AI summary

A method for adjusting and controlling a boundary of graphene, comprising: providing an insulating substrate and placing the insulating substrate in a growth chamber; and feeding first reaction gas into the growth chamber, the first reaction gas at least comprising carbon source gas, and controlling a flow rate of the first reaction gas to forming a graphene structure having a first boundary shape on a surface of the insulating substrate through controlling a flow rate of the first reaction gas. The present invention realizes the controllability of the boundary of the graphene by adjusting the ratio of the carbon source gas to catalytic gas in the growth process of graphene on the surface of the substrate; the present invention can enable graphene to sequentially continuously grow by changing growth conditions on the basis of already formed graphene, so as to change the original boundary shape of the graphene.