Graphene Pattern Synthesis via Catalyst Block Adhesion

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Solution Overview

Problem

Conventional methods for patterning graphene often result in contamination and low manufacturing efficiency due to etching and transferring processes, which hinder the formation of high-quality graphene thin films necessary for electro-optical devices.

Innovation Solution

A method for directly synthesizing a graphene pattern by physically adhering a catalyst block with gamma-alumina to a growth substrate in an atmosphere containing a carbon source and growth inhibitor, inhibiting defect diffusion and allowing for selective graphene thin film formation without individual patterning processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional etching or transferring processes are used for patterning graphene, then graphene patterns can be formed, but contamination occurs and manufacturing efficiency is low

Engineering Contradiction:
Improvegraphene pattern qualityVSAvoidmanufacturing efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The catalyst blocks are positioned and prepared on the growth substrate before the graphene synthesis process begins. This preliminary arrangement of catalyst blocks at specific locations enables direct selective growth of graphene patterns without requiring subsequent etching or transferring steps, thereby improving both pattern quality and manufacturing efficiency

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention combines the catalyst positioning and graphene pattern formation into a single integrated process. By physically adhering catalyst blocks directly to the growth substrate and performing in-situ synthesis, the separate steps of catalyst placement, graphene growth, and pattern transfer are merged into one continuous process, eliminating contamination risks and improving productivity

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If conventional etching or transferring processes are used for patterning graphene, then graphene patterns can be formed, but contamination occurs

Engineering Contradiction:
Improvegraphene pattern qualityVSAvoidcontamination
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The catalyst blocks themselves serve as both the positioning template and the growth catalyst. By using the same catalyst blocks for both purposes, the system eliminates the need for external patterning agents or transfer media that could introduce contamination, allowing the graphene to grow directly in its final patterned configuration

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The invention extracts and eliminates the problematic intermediate steps of etching and transferring from the graphene fabrication process. By directly synthesizing graphene patterns at the catalyst block interfaces, the harmful etching chemicals and transfer media are completely removed from the process, preventing contamination

Inventive Principle:
Principle #2Taking out (Extraction)

3Productivity

If selective graphene thin film formation is achieved through direct synthesis, then manufacturing efficiency is improved, but precise control of graphene properties is required

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidgraphene thin film quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Different regions of the growth substrate receive different treatments by positioning catalyst blocks only at specific locations. This creates local variations in graphene growth, allowing high-quality graphene to form at catalyst interfaces while other regions remain unaffected or receive different processing, enabling precise control over where and how graphene properties are optimized

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention controls graphene thin film quality by adjusting synthesis parameters such as carbon source concentration, growth temperature, and catalyst block composition. By optimizing these parameters specifically for the direct synthesis process, high-quality graphene can be produced efficiently without requiring post-growth processing

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of high-quality graphene thin films with reduced defects, enhancing the intrinsic performance and manufacturing efficiency for electro-optical devices like electro-optical modulators.

Implementation Method 1

a catalyst block including a catalyst material is physically adhered to a portion of a growth substrate to form an interface between the catalyst block and the growth substrate

Methodology Applied
Scientific EffectPhysical adhesion: Adhesive

Implementation Method 2

A graphene thin film is formed selectively at the interface between the catalyst block and the growth substrate in an atmosphere including a carbon source and a growth inhibitor

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 3

the growth inhibitor contains oxygen... in an atmosphere including a carbon source and a growth inhibitor

Methodology Applied
Scientific EffectGrowth inhibition: Diffusion Barrier

Implementation Method 4

at least one of the catalyst block and the growth substrate is chemically cleaned by using Piranha solution

Methodology Applied
Scientific EffectChemical cleaning: Oxidation

Implementation Method 5

at least one of the catalyst block and the growth substrate is physically cleaned by using supersonic wave

Methodology Applied
Scientific EffectUltrasonic cleaning: Ultrasonic Vibration

Data Source

PatentUS10815565B2Method for synthesizing a graphene pattern
Publication Date: 2020.10.27 KOREA INST OF SCI & TECH
  • US10815565B2 patent drawing
  • US10815565B2 patent drawing
  • US10815565B2 patent drawing

AI summary

A method for synthesizing a graphene pattern includes physically adhering a catalyst block including a catalyst material, which is a gamma-alumina thin film, to a portion of a growth substrate to form a flat interface between the catalyst block and the growth substrate; forming a graphene thin film selectively at the flat interface between the catalyst block and the growth substrate in an atmosphere including a carbon source and a growth inhibitor containing oxygen, and applying a force to physically separate the catalyst block from the graphene thin film and the growth substrate, wherein carbon atoms from the carbon source are diffused along the flat interface and the growth inhibitor is substantially blocked by a diffusion barrier formed by the flat interface so that the graphene thin film is selectively formed at the flat interface.