Graphene Synthesis Chamber With Optical Heating

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Solution Overview

Problem

The challenge of mass-producing large graphene sheets at low costs is hindered by the time-consuming process of setting up a high-temperature/high-vacuum environment in existing graphene synthesis methods.

Innovation Solution

A graphene synthesis chamber is designed with a main heating unit emitting near-infrared, mid-infrared, and visible wavelength light to rapidly heat the substrate, accompanied by auxiliary heating units to efficiently control temperature and minimize heating time, allowing for uniform heating and reduced synthesis time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional CVD method with high-temperature/high-vacuum environment is used to synthesize graphene, then graphene can be synthesized on metal thin film, but it takes relatively long time to set up the environment which hinders mass production

Engineering Contradiction:
Improvemass production capabilityVSAvoidtime to set up high-temperature/high-vacuum environment
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent replaces the conventional mechanical heating system with a laser-based optical heating system. The laser beam directly heats the metal thin film substrate without requiring the entire chamber to be heated to high temperatures, eliminating the need for time-consuming high-temperature environment setup while enabling rapid graphene synthesis for mass production

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

Instead of heating the entire chamber uniformly, the laser beam provides localized heating directly to the metal thin film substrate where graphene synthesis is needed. This localized energy input achieves the required high temperature at the substrate surface without requiring the whole chamber to be heated, significantly reducing setup time

Inventive Principle:
Principle #3Local quality

2Temperature

If conventional heating methods are used to heat the substrate, then the substrate can be heated to synthesis temperature, but the heating process is slow and takes relatively long time

Engineering Contradiction:
Improvesubstrate temperatureVSAvoidheating time
Core Design Contradiction:
TemperatureVSLoss of time

Solution Approach 1:

The patent replaces conventional mechanical heating methods with laser optical heating. The laser beam delivers concentrated optical energy directly to the substrate, converting optical energy to thermal energy rapidly and achieving synthesis temperature in a fraction of the time required by conventional heating methods

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The laser heating system can be controlled to deliver periodic or continuous energy input to the substrate, allowing rapid temperature cycling and precise temperature control that achieves synthesis temperature much faster than conventional gradual heating methods

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables rapid and uniform heating of the substrate, reducing the time needed to achieve synthesis temperatures and facilitating mass production of graphene while minimizing impurity deposition on chamber walls.

Implementation Method 1

a main heating unit which emits at least one light to the inner space to heat the substrate

Methodology Applied
Scientific EffectNear-infrared radiation heating: Infrared Radiation

Implementation Method 2

a main heating unit which emits at least one light to the inner space to heat the substrate

Methodology Applied
Scientific EffectMid-infrared radiation heating: Infrared Radiation

Implementation Method 3

a main heating unit which emits at least one light to the inner space to heat the substrate

Methodology Applied
Scientific EffectVisible light heating: Light

Implementation Method 4

at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 5

at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS11486035B2Graphene synthesis chamber and method of synthesizing graphene by using the same
Publication Date: 2022.11.01 VERSARIEN PLC
  • US11486035B2 patent drawing
  • US11486035B2 patent drawing
  • US11486035B2 patent drawing

AI summary

A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.