Graphene Coated Optical Element for Aberration Compensation
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Solution Overview
Problem
Current projection arrangements for lithographic structures face challenges in compensating for imaging aberrations induced by projection light, particularly in transmitted-light operation, without causing shading effects.
Innovation Solution
A projection arrangement featuring an optical element with a coating composed of electrically conductive materials like graphene or molybdenum sulfide, which changes optical properties with temperature, allowing for targeted heat distribution without shading, enabling precise manipulation of wavefronts and compensation for imaging aberrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If heating wires or conventional thermal manipulation methods are applied to optical elements, then imaging aberrations can be compensated, but shading effects and diffraction are introduced that degrade imaging quality
Solution Approach 1:
The patent changes the physical state and properties of the coating material by applying voltage to alter its optical parameters (refractive index, absorption coefficient) dynamically. This allows thermal manipulation without permanent structural changes that cause shading, resolving the contradiction between aberration compensation and imaging quality
Solution Approach 2:
The patent uses composite structures combining optical elements with specially designed coatings that have both optical functionality and electrical responsiveness. This composite approach enables dual functionality: optical precision and electrical controllability, eliminating the need for separate heating elements that cause shading
2Manufacturing precision
If a coating material is applied to optical elements for wavefront manipulation, then imaging aberrations can be compensated, but the coating may absorb or scatter projection light reducing transmission
Solution Approach 1:
The coating material's optical parameters are dynamically adjusted by applying voltage, allowing the system to switch between states of high transmission and high wavefront control precision. This resolves the contradiction by making the coating's light interaction properties controllable rather than fixed
Solution Approach 2:
The patent introduces dynamic controllability to the coating material through electrical actuation, allowing real-time adjustment of optical properties. This enables the coating to adapt its transmission and wavefront manipulation characteristics based on operational requirements, eliminating the static trade-off
3Manufacturing precision
If conventional heating mechanisms are used to compensate for thermal effects, then imaging aberrations can be corrected, but additional complex components are required that increase system complexity
Solution Approach 1:
The patent merges the optical coating with electrical actuation capabilities into a single integrated component. The coating material itself becomes both the optical element and the actuator, eliminating the need for separate heating wires, thermal sources, and control mechanisms, thus reducing system complexity while maintaining aberration compensation accuracy
Solution Approach 2:
The coating material serves multiple functions simultaneously: optical wavefront manipulation, thermal response control, and electrical actuation. This multi-functionality eliminates the need for dedicated components for each function, simplifying the overall system while achieving precise aberration compensation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively compensates for imaging aberrations by locally altering the refractive index or optical path length, improving imaging quality without diffraction or shading, and can be integrated into existing systems, offering a versatile and cost-effective wavefront manipulator.
Implementation Method 1
at least one mechanism for coupling energy into the layer material in such a way that the layer material converts coupled-in energy into thermal energy
Implementation Method 2
the layer material and/or the optical element change(s) an optical property, in particular a refractive index or an optical path length, depending on a temperature change
Data Source
AI summary
A projection arrangement for imaging lithographic structure information comprises: an optical element, which has at least partly a coating composed of an electrically conductive layer material. The coating comprises a continuous region, which has no elements that shade projection light. In this case, the layer material and/or the optical element change(s) an optical property, in particular a refractive index or an optical path length, depending on a temperature change. At least one mechanism for coupling energy into the layer material is provided, which couples in energy in such a way that the layer material converts coupled-in energy into thermal energy. The layer material may comprise graphene, chromium and/or molybdenum sulfide (MoS2).