Multilayer Graphene Work Function Control via CVD Doping

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for manufacturing multilayer graphene struggle to control the optoelectronic properties and maintain the stacking structure during the synthesis process, particularly in controlling the bandgap and doping levels, which limits their application in optoelectronic devices.

Innovation Solution

A method involving chemical vapor deposition using a copper catalyst with a nonmetal element, such as sulfur, to simultaneously control graphene growth and doping, creating Bernal-stacked multilayer graphene with a concentration gradient of the nonmetal element, thereby adjusting the work function and bandgap without additional processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If chemical doping is performed after graphene synthesis to control band structure, then the bandgap can be adjusted, but the stacking structure of graphene cannot be maintained

Engineering Contradiction:
Improvebandgap controlVSAvoidstacking structure
Core Design Contradiction:
Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The nonmetal element is dissolved into the copper catalyst before graphene synthesis begins. This preliminary doping of the catalyst ensures that the doping process occurs simultaneously with graphene growth, preventing subsequent structural disruption. The catalyst is pre-prepared with controlled nonmetal concentration to enable integrated growth and doping.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The synthesis process merges two separate operations (graphene growth and doping) into a single simultaneous process. By dissolving the nonmetal element in the copper catalyst beforehand, the doping occurs during the chemical vapor deposition process itself, eliminating the need for separate post-synthesis doping steps that would disrupt the stacking structure.

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If additional processing is used to control doping after synthesis, then doping levels can be adjusted, but the process complexity increases

Engineering Contradiction:
Improvedoping controlVSAvoidprocessing steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The method combines graphene synthesis and doping into a single integrated process. The nonmetal element is introduced by dissolving it in the copper catalyst before synthesis, allowing both growth and doping to occur simultaneously during chemical vapor deposition, thereby eliminating multiple separate processing steps.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The copper catalyst serves multiple functions: it acts as the substrate for graphene growth and simultaneously serves as the doping source. By dissolving the nonmetal element in the copper catalyst, the catalyst becomes a dual-purpose material that enables both synthesis and controlled doping in one operation.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If conventional chemical vapor deposition is used, then graphene can be synthesized, but simultaneous control of growth and doping is not achieved

Engineering Contradiction:
Improvegraphene synthesisVSAvoidsimultaneous growth and doping control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The method changes the physical-chemical parameters of the copper catalyst by dissolving a nonmetal element into it. This parameter change transforms the catalyst from a simple growth substrate to an active doping source, enabling simultaneous control of both graphene growth rate and doping concentration through the chemical vapor deposition process.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The copper catalyst is enhanced to perform multiple functions simultaneously: it provides the surface for carbon deposition during growth while also releasing the nonmetal element for doping. This multi-functional catalyst enables coordinated control of synthesis and doping without requiring separate process steps.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the precise control of optoelectronic properties of multilayer graphene, maintaining the stacking structure and enabling the adjustment of the number of layers and work function, resulting in improved performance for optoelectronic devices.

Implementation Method 1

bringing a metal substrate into contact with a nonmetal element, thus forming the nonmetal element adsorbed to the surface of the metal substrate

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

heat-treating the nonmetal element adsorbed to the surface of the metal substrate, the nonmetal element dissolved in the surface of the metal substrate and/or the metal compound reacted with the nonmetal element, whereby the nonmetal element adsorbed to the surface of the metal substrate, the nonmetal element dissolved in the surface of the metal substrate and/or the nonmetal element formed by reduction of the metal compound are dissolved into the interior of the metal substrate

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Implementation Method 3

subjecting a graphene precursor to chemical vapor deposition on the metal substrate containing the nonmetal element dissolved therein, thereby manufacturing multilayer graphene that is doped with the nonmetal element on the metal substrate

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 4

the nonmetal element formed by reduction of the metal compound

Methodology Applied
Scientific EffectReduction: Reduction

Data Source

PatentUS10755939B2Multilayer graphene using chemical vapor deposition and method of manufacturing same
Publication Date: 2020.08.25 CENT FOR ADVANCED SOFT ELECTRONICS
  • US10755939B2 patent drawing
  • US10755939B2 patent drawing
  • US10755939B2 patent drawing

AI summary

Disclosed is a method of manufacturing multilayer graphene, including (a) contacting of a metal substrate with a nonmetal element, (b) reduction through heat treatment, and (c) chemical vapor deposition of a graphene precursor on the metal substrate containing the nonmetal element dissolved therein, thereby manufacturing multilayer graphene that is doped with the nonmetal element on the metal substrate. In the multilayer graphene thus manufactured, the number of graphene layers and the work function are simultaneously adjusted by controlling the concentration of doped nonmetal element in a thickness direction of graphene through interactions related to the reduction of the nonmetal element dissolved in a copper catalyst and the growth of graphene, and moreover, the stacking structure of graphene is maintained and the optoelectronic properties of multilayer graphene can be controlled by simultaneously regulating graphene growth and doping during the synthesis procedure without additional processing.