Non-Planar Graphene Detectors Integrated with Silicon Waveguides

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Solution Overview

Problem

Current silicon photonic interconnects, primarily using copper, face challenges in scaling to higher gigabyte performance due to increased costs and power consumption, necessitating the development of more efficient data transfer technologies.

Innovation Solution

The integration of non-planar graphene detectors with silicon waveguide structures, formed through thermal decomposition of carbon-based materials on silicon-on-insulator substrates, which increases the density and efficiency of graphene-based applications and utilizes the full bandgap range of graphene for enhanced detection and scaling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If copper interconnects are used for data transfer, then existing semiconductor fabrication techniques can be utilized, but power consumption and costs increase at higher gigabyte performance levels

Engineering Contradiction:
Improvepower consumptionVSAvoiddata transfer performance
Core Design Contradiction:
Loss of energyVSProductivity

Solution Approach 1:

The patent replaces copper electrical interconnects with silicon photonic waveguides that use light instead of electrical signals for data transfer. This substitution of the transmission medium (from electrical to optical) resolves the contradiction by enabling high-speed data transfer without the resistive power losses inherent in copper interconnects at high performance levels.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If planar graphene structures are used, then fabrication is simpler, but detection efficiency and density are reduced

Engineering Contradiction:
Improvedetection efficiencyVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent employs non-planar, three-dimensional graphene structures including vertically oriented graphene sheets and graphene wrapped around waveguide structures. This curvature and verticality increase the effective surface area and interaction volume with light, thereby enhancing detection efficiency without requiring planar simplification.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The invention transitions from two-dimensional planar graphene structures to three-dimensional configurations with vertical components. Graphene sheets are positioned at various angles and heights relative to the waveguide, creating a multi-dimensional arrangement that maximizes light-matter interaction and detection efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the detection efficiency and scalability of silicon photonics, enabling next-generation terrabit communications and dense System on Chip (SoC) applications while reducing power consumption and costs.

Implementation Method 1

annealing the carbon based material to thermally decompose the carbon based material into a non-planar sheet of stressed graphene material

Methodology Applied
Scientific EffectThermal decomposition: Pyrolysis

Data Source

PatentUS10804416B2Integrated graphene detectors with waveguides
Publication Date: 2020.10.13 GLOBALFOUNDRIES US INC
  • US10804416B2 patent drawing
  • US10804416B2 patent drawing
  • US10804416B2 patent drawing

AI summary

The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.