Graphene Photodetector with Separated Drain Electrode

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Solution Overview

Problem

Existing graphene-semiconductor heterojunction photodetectors face limitations in controlling the Fermi level and Schottky barrier height, leading to low photoresponsivity and difficulty in adjusting gain according to varying environmental conditions.

Innovation Solution

A graphene-semiconductor heterojunction photodetector design with a gate electrode having light transmittance, a physically separated drain electrode, and an intermediate layer between the substrate and graphene layer, allowing for control of dark current and photoresponsivity through gate voltage adjustments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a Schottky junction is formed between graphene layer and silicon substrate with gate electrode on rear surface, then photocurrent is generated throughout entire interface improving photoresponsivity, but Fermi level of graphene layer cannot be controlled and Schottky barrier height cannot be precisely controlled

Engineering Contradiction:
ImprovephotoresponsivityVSAvoidcontrol of Fermi level and Schottky barrier height
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The device is divided into distinct functional regions: a light-receiving region where the graphene-silicon heterojunction is formed for photocurrent generation, and a gate control region where the gate electrode is positioned to control the Fermi level and Schottky barrier height independently. This segmentation allows simultaneous achievement of high photoresponsivity through interface photocurrent and precise control through gate voltage adjustment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

An intermediate layer is introduced between the graphene layer and the silicon substrate. This intermediate layer serves as a mediator that enables precise control of the Schottky barrier height while maintaining the photocurrent generation capability at the graphene-silicon interface. The intermediate layer acts as a tuning element that decouples the barrier control from the photocurrent generation process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If gain is adjusted according to electric field from gate in existing photodetectors, then photosensitivity can be adapted to various environments, but existing gate structures cannot achieve precise control due to opaque metal gates and rear surface positioning

Engineering Contradiction:
Improvephotosensitivity adjustment for various environmentsVSAvoidcontrol precision of gain and photosensitivity
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The gate electrode is designed with light transmittance and positioned in the light-receiving region, enabling control of the electric field parameter throughout the active area. By adjusting the gate voltage, the Fermi level and Schottky barrier height are precisely controlled, which in turn adjusts the gain and photosensitivity parameters to adapt to various environmental conditions with high precision.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If drain electrode is in physical contact with graphene layer for current collection, then simple structure is achieved, but dark current increases and photodetection efficiency decreases

Engineering Contradiction:
Improvestructure simplicityVSAvoidphotodetection efficiency
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The drain electrode is extracted from direct contact with the graphene layer in the light-receiving region. Instead, the drain electrode is positioned adjacent to the graphene layer with a controlled separation. This extraction eliminates the dark current path through direct contact while maintaining efficient photocurrent collection through the prescribed geometric arrangement, thereby improving photodetection efficiency.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enhances photosensitivity, output voltage, and photodetection efficiency by reducing dark current and enabling adjustable photoresponsivity according to environmental conditions.

Implementation Method 1

a gate electrode formed on the gate insulating layer and having light transmittance

Methodology Applied
Scientific EffectLight transmittance:

Implementation Method 2

a photodetector has a structure in which, when light is incident on an active region, the light induces a change in current to form a photocurrent

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

a Schottky junction is formed between the graphene layer 20 and the silicon substrate 10, thereby forming a diode structure. When light is incident, a photocurrent is generated, and the photocurrent occurs throughout the entire interface between the graphene layer 20 and the silicon substrate 10

Methodology Applied
Scientific EffectSchottky junction:

Implementation Method 4

there is a limitation in controlling the Fermi level of the graphene layer 20 because the silicon substrate 10 itself acts as a portion of the gate electrode 60 or the gate electrode 60 acts on the rear surface thereof

Methodology Applied
Scientific EffectFermi level control:

Data Source

PatentUS11217709B2Graphene-semiconductor heterojunction photodetector and method of manufacturing the same
Publication Date: 2022.01.04 GWANGJU INST OF SCI & TECH
  • US11217709B2 patent drawing
  • US11217709B2 patent drawing
  • US11217709B2 patent drawing

AI summary

In a graphene-semiconductor heterojunction photodetector and a method of manufacturing the same according to the present inventive concept, a source electrode and a test electrode are formed to face each other on a graphene layer, and a drain electrode is formed in a direction perpendicular to a central region portion of the graphene layer, so that the drain electrode may be physically separated from the graphene layer. Further, charges formed at the central region portion of the graphene layer are transmitted to the drain electrode through a substrate, so that high photosensitivity may be secured, and a high output voltage may be secured for the applied light. Accordingly, the drain electrode is formed at a side surface of the graphene layer, so that the size of the drain electrode may be easily controlled, and a high output voltage may be obtained.