Electrode connecting structure including adhesion layer and electronic device including the same
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Solution Overview
Problem
The challenge lies in creating an electrode connecting structure with precise dimensions for reduced-size electronic devices, where the thickness of a general diffusion barrier film is limited, making it difficult to form effectively, especially when connecting components like source, drain, or gate to the outside.
Innovation Solution
An electrode connecting structure is developed with an insulating layer, a graphene layer on the insulating layer, an adhesion layer of metal chalcogenide-based material on the graphene layer, and a metal layer on the adhesion layer, where the adhesion layer improves the interface characteristics between the graphene and metal layers, preventing diffusion and ensuring stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the size of the electronic device is reduced, then the device size is decreased, but the thickness and width of the electrode connecting structure must also be reduced, making it difficult to form a diffusion barrier film with precise dimensions
Solution Approach 1:
The patent introduces a multi-layer intermediate structure consisting of a graphene layer and an adhesion layer between the copper electrode and the diffusion barrier film. This intermediary structure enables precise dimensional control in miniaturized devices by providing stable interfaces that facilitate accurate formation of the diffusion barrier film, thereby resolving the contradiction between device size reduction and manufacturing precision maintenance.
2Volume of moving object
If a general diffusion barrier film is used in miniaturized devices, then the device size is reduced, but the film cannot be formed effectively due to limited thickness control
Solution Approach 1:
The patent applies preliminary actions by forming the graphene layer and adhesion layer before depositing the diffusion barrier film. This preparatory multi-layer structure provides a stable foundation that enables effective formation of the diffusion barrier film in miniaturized devices, overcoming the manufacturing difficulties associated with direct film deposition on reduced-scale structures.
3Manufacturing precision
If the thickness of the diffusion barrier film is reduced for precise dimensions, then the device size is decreased, but the diffusion barrier effectiveness is compromised
Solution Approach 1:
The patent employs a composite material structure comprising a graphene layer, an adhesion layer, and a diffusion barrier film. This composite structure enhances diffusion barrier effectiveness while maintaining precise dimensional control in miniaturized devices. The combination of materials provides both the necessary thickness for effective diffusion prevention and the dimensional precision required for small-scale electronic devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the interface stability between the graphene and metal layers, preventing exfoliation and effectively preventing diffusion, thus enabling the creation of high-characteristic electronic devices with improved precision and reliability.
Implementation Method 1
a material, such as Ta or TaN is used for forming a diffusion barrier to prevent diffusion of copper outside of the electrode connecting structure or to prevent diffusion of an external material into the electrode connecting structure
Implementation Method 2
an adhesion layer formed on the graphene layer, and a metal layer formed on the adhesion layer
Data Source
Figure 1~3a
Figure 3b~4
AI summary
Provided are an electrode connecting structure that includes an adhesion layer formed between a graphene layer and a metal layer and an electronic device having the electrode connecting structure. The electrode connecting structure may include an adhesion layer formed of a two-dimensional material provided between the graphene layer and the metal layer. The graphene layer may be a diffusion barrier, and the adhesion layer may stably maintain the interface characteristics of the graphene layer and the metal layer when the metal layer is formed on a surface of the graphene layer.