Microwave Plasma CVD Graphene Electrode for Supercapacitor Energy Density

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Solution Overview

Problem

Existing electrostatic double-layer capacitors and hybrid supercapacitors face limitations due to low energy density and high energy storage costs, which restrict their application scope.

Innovation Solution

A manufacturing method for an energy storage element electrode involves forming multi-layer graphene walls using microwave plasma chemical vapor deposition and subsequent electrochemical activation treatment to intercalate ions between graphene walls, thereby enhancing energy density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If multiple processes are performed to improve the physical and chemical properties of graphene to increase energy density, then the energy density of the energy storage element is improved, but the process complexity and manufacturing costs increase significantly

Engineering Contradiction:
Improveenergy densityVSAvoidprocess complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The invention changes the key parameter of gas flow rate ratio (carrier gas to carbon precursor gas) to control the formation of multi-layer graphene walls with specific interlayer spacing. By adjusting this single parameter within the range of 1:10 to 10:1, the process achieves improved energy density without requiring multiple complex treatment steps, thus resolving the contradiction between energy density improvement and process complexity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention utilizes the inherent porous structure of multi-layer graphene walls with controlled interlayer spacing (0.34 nm to 0.52 nm) to accommodate electrolyte ions. This porous structure is formed directly during the CVD process by controlling the carbon precursor gas flow, eliminating the need for subsequent complex pore-forming treatments while achieving high energy density

Inventive Principle:
Principle #31Porous materials

2Quantity of substance

If multiple processes are performed to improve the physical and chemical properties of graphene to increase energy density, then the energy density of the energy storage element is improved, but the manufacturing time and costs increase

Engineering Contradiction:
Improveenergy densityVSAvoidprocess time
Core Design Contradiction:
Quantity of substanceVSLoss of time

Solution Approach 1:

The invention performs the interlayer spacing adjustment action during the initial graphene growth phase by controlling the gas flow rate ratio in the CVD process. This preliminary action eliminates the need for subsequent separate treatment steps, significantly reducing the total manufacturing time while achieving the desired energy density improvement

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

By changing the gas flow rate ratio parameter during a single CVD process run, the invention achieves both graphene formation and interlayer spacing optimization in one step, reducing the number of process steps and overall manufacturing time while improving energy density

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method increases the surface area and wettability of the electrode, leading to improved energy density of the energy storage element while reducing process complexity and costs.

Implementation Method 1

Multi-layer graphene walls are formed on the substrate through microwave plasma chemical vapor deposition

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

Multi-layer graphene walls are formed on the substrate through microwave plasma chemical vapor deposition

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 3

The substrate containing the multi-layer graphene walls is immersed in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls

Methodology Applied
Scientific EffectElectrochemical activation: Electrochemiluminescence

Data Source

PatentUS20250157746A1Electrode of energy storage element and manufacturing method thereof
Publication Date: 2025.05.15 IND TECH RES INST
  • US20250157746A1 patent drawing
  • US20250157746A1 patent drawing
  • US20250157746A1 patent drawing

AI summary

A manufacturing method of an electrode of an energy storage element includes: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls. A volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. An electrode of an energy storage element is also provided.