Large-Area Graphene Characterization via Expanded Electron Diffraction

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Solution Overview

Problem

Current methods for characterizing large area two-dimensional nanomaterials, such as graphene, are inefficient due to the small beam size of low energy electron diffraction (LEED) and selected area electron diffraction (SAED) techniques, which limit the characterization of crystal distribution and require time-consuming mapping, and cannot handle samples larger than 3 millimeters.

Innovation Solution

A transmission-type low energy electron microscopy system with a variable beam size from hundreds of micrometers to half a centimeter is developed, allowing for efficient characterization of centimeter-sized graphene domains using transmitted electron diffraction and imaging, enabling the analysis of crystal texture and orientation across large areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If LEED or SAED is used to characterize crystal distribution, then measurement precision is improved, but productivity deteriorates due to time-consuming mapping

Engineering Contradiction:
Improvecrystal distribution characterizationVSAvoidcharacterization efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent combines LEED's low energy transmitted electron diffraction capability with a large area illumination system, merging the advantages of precise diffraction measurement with large-scale sample coverage. The electron beam is expanded to illuminate the entire sample area, allowing simultaneous acquisition of diffraction information from the whole sample rather than point-by-point mapping.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from one-dimensional point-by-point scanning to two-dimensional parallel diffraction measurement. By expanding the electron beam to cover the entire sample area, the system captures diffraction patterns from all regions simultaneously, adding a spatial dimension to the measurement process and dramatically improving productivity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If LEED is used with small beam size, then measurement precision is improved, but productivity deteriorates and adaptability worsens for large samples

Engineering Contradiction:
Improvediffraction pattern qualityVSAvoidsample size coverage
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent expands the electron beam from a small focused spot to a large area illumination, transitioning from point measurement to area measurement. This dimensional change allows the system to characterize samples of any size by illuminating the entire sample area simultaneously, greatly improving adaptability to large samples while maintaining diffraction pattern quality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If SAED with large magnification is used, then measurement precision is improved, but productivity deteriorates due to nanometer to micrometer aperture size

Engineering Contradiction:
Improvecrystal structure resolutionVSAvoidmapping time
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent merges the high-resolution diffraction capability of SAED with large area illumination. By using low energy transmitted electrons that can penetrate the entire sample thickness uniformly across the beam area, the system achieves both precise crystal structure resolution and comprehensive sample coverage in a single measurement, eliminating the need for time-consuming point-by-point mapping.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables rapid and efficient characterization of large area graphene samples, including polycrystalline MoS2, and observes the 2×2 0° adsorption pattern of water on suspended graphene, providing detailed crystal distribution information without damaging the samples.

Implementation Method 1

The electron beam emitted from the electron gun would pass through the two-dimensional nanomaterial sample and reach the imaging device to form diffraction spot and/or diffraction imaging

Methodology Applied
Scientific EffectElectron diffraction: Diffraction

Implementation Method 2

an imaging device and an anode. The imaging device is located between the electron gun and the anode. The electron beam emitted from the electron gun would move to the imaging device under the force of the anode

Methodology Applied
Scientific EffectElectron beam detection: Photoelectric Effect

Data Source

PatentUS10297417B2Method for characterizing two dimensional nanomaterial
Publication Date: 2019.05.21 HON HAI PRECISION INDUSTRY CO LTD
  • US10297417B2 patent drawing
  • US10297417B2 patent drawing
  • US10297417B2 patent drawing

AI summary

The disclosure relates to a method for characterizing a two-dimensional nanomaterial sample. The two-dimensional nanomaterial sample is placed in a vacuum chamber. An electron beam passes through the two-dimensional nanomaterial sample to form a diffraction electron beam and a transmission electron beam to form an image on an imaging device. An angle θ between the diffraction electron beam and the transmission electron is obtained. A lattice period d of the two-dimensional nanomaterial sample is calculated according to a formula d sin θ≅dθ=λ, where λ represents a wavelength of the electron beam.