Graphene Growth on Insulating Substrates via Gaseous Catalyst

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for growing graphene on insulating substrates result in slow growth rates, low quality, small crystalline domains, and high defect densities, making large-scale production challenging and costly.

Innovation Solution

A method involving the introduction of a gaseous catalytic element into a growth chamber, where the substrate is heated and a carbon source is fed in, allowing for the growth of high-quality graphene thin films on insulating substrates using thermal or plasma-enhanced chemical vapor deposition, with catalytic atoms adsorbing around the graphene edges to form weaker bonds and reduce defect density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If graphene is grown directly on insulating substrate using CVD method, then transfer process is avoided and production cost is reduced, but growth rate is slow and quality is poor

Engineering Contradiction:
Improveproduction costVSAvoidgrowth rate
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent introduces a metal catalyst layer as an intermediary between the insulating substrate and the graphene growth environment. This catalyst layer enables rapid graphene growth while maintaining the advantage of direct growth on insulating substrates. The catalyst facilitates carbon decomposition and graphene nucleation, solving the contradiction between avoiding transfer processes and achieving high growth rates.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent optimizes multiple parameters including catalyst material selection (Fe, Co, Ni, Cu), thickness control (1-10 nm), temperature profiles (800-1000°C), and gas flow rates to achieve both high growth rate and high quality graphene. By precisely controlling these parameters, the system achieves rapid growth without sacrificing quality.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If graphene is grown directly on insulating substrate, then transfer process is avoided, but growth time is long and single crystalline domain is small

Engineering Contradiction:
Improveprocess simplicityVSAvoidsingle crystalline domain size
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The metal catalyst layer serves as a mediator that promotes large single crystalline domain formation. The catalyst provides a structured surface that guides graphene nucleation and growth, enabling large domain sizes (micrometer to millimeter scale) while maintaining direct growth on insulating substrates, thus preserving process simplicity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent performs preliminary catalyst deposition and activation before graphene growth. This preliminary action prepares the substrate surface with optimal catalytic sites, ensuring that subsequent graphene growth produces large single crystalline domains from the outset, eliminating the need for post-growth processing.

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If graphene is grown on insulating substrate without catalyst, then transfer process is avoided, but defect density is high

Engineering Contradiction:
Improveproduction simplicityVSAvoidgraphene quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The metal catalyst layer acts as a protective intermediary during growth, ensuring high-quality graphene formation. The catalyst mediates carbon decomposition and incorporation, reducing defects while maintaining the simplicity of direct growth on insulating substrates. The catalyst-graphene interface ensures proper atomic arrangement and minimizes structural defects.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method significantly enhances the growth rate and quality of graphene, reducing defect density and production costs, facilitating mass production for applications in electronic devices and transparent conducting films.

Implementation Method 1

introducing a gaseous catalytic element into a growth chamber, where the substrate is heated and a carbon source is fed in, allowing for the growth of high-quality graphene thin films

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 2

allowing for the growth of high-quality graphene thin films on insulating substrates using thermal or plasma-enhanced chemical vapor deposition

Methodology Applied
Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Implementation Method 3

allowing for the growth of high-quality graphene thin films on insulating substrates using thermal or plasma-enhanced chemical vapor deposition

Methodology Applied
Scientific EffectPlasma Enhanced Chemical Vapour Deposition: Plasma Enhanced Chemical Vapour Deposition

Data Source

PatentUS10017878B2Growth method of graphene
Publication Date: 2018.07.10 SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
  • US10017878B2 patent drawing
  • US10017878B2 patent drawing
  • US10017878B2 patent drawing

AI summary

The present invention provides a growth method of grapheme, which at least comprises the following steps: S1: providing an insulating substrate, placing the insulating substrate in a growth chamber; S2: heating the insulating substrate to a preset temperature, and introducing a gas containing catalytic element into the growth chamber; S3: feeding carbon source into the growth chamber and growing a graphene thin film on the insulating substrate. The present invention adopts a catalytic manner of introducing catalytic element, and rapid grows a high quality graphene on the insulating substrate, which avoids the transition process of the graphene, enables to improve the production yield of the graphene, reduces the growth cost of the graphene, and thus the mass production can be facilitated. The graphene grown by the present invention may be applied in the field of novel graphene electronic devices, graphene transparent conducting film, transparent conducting coating and the like.