Graphene HEMT UV Detector for Low Dark Current

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current UV photodetectors based on traditional architectures face limitations due to shallow penetration depth and strong surface recombination, failing to meet requirements for low dark current, fast response, and high signal-to-noise ratio across the short wavelength spectrum.

Innovation Solution

A high electron mobility transistor (HEMT) design featuring a heterostructure with an intrinsic semiconductor, a two-dimensional electron gas, and a graphene layer as both a transparent electrode and hole extraction contact, minimizing surface recombination and enhancing carrier extraction efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If traditional photodetector architectures are used, then device structure is simple, but surface recombination is strong and penetration depth is shallow

Engineering Contradiction:
Improvesurface recombinationVSAvoiddevice structure
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent introduces a two-dimensional electron gas (2DEG) layer at the AlGaN/GaN heterostructure interface, creating a high-mobility conduction path that operates in a different dimensional space than traditional bulk conduction. This 2D channel allows carriers to move laterally with high mobility while avoiding surface recombination effects, effectively resolving the contradiction between reducing surface recombination and maintaining simple device structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs composite material structures including AlGaN/GaN heterostructures with 2DEG and graphene contacts. The combination of wide-bandgap AlGaN, high-mobility 2DEG, and conductive graphene creates a multi-material system where each component addresses specific limitations: AlGaN provides solar-blind detection, 2DEG provides high-speed transport, and graphene provides transparent electrode functionality with extended extraction area.

Inventive Principle:
Principle #40Composite materials

2Reliability

If highly doped contact layers are used, then electrical conductivity is improved, but surface recombination increases and penetration depth decreases

Engineering Contradiction:
Improveelectrical conductivityVSAvoidsurface recombination
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the high-conductivity function from traditional highly doped contact layers and relocates it to the 2DEG channel and graphene contacts. The 2DEG provides high electron mobility and conductivity without the harmful surface recombination effects of highly doped layers, while graphene provides transparent electrode conductivity. This extraction of the conductivity function from doped layers resolves the contradiction between electrical conductivity and surface recombination.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The 2DEG layer acts as an intermediary between the AlGaN active layer and the metal contact, providing a high-mobility transport path that mediates carrier extraction without requiring high doping. The graphene contact serves as another intermediary, providing transparent electrode functionality while extending the extraction area. These intermediary layers enable good electrical conductivity without the harmful effects of highly doped contact layers.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If graphene is added as transparent electrode and hole extraction contact, then carrier extraction efficiency is improved, but device complexity increases

Engineering Contradiction:
Improvecarrier extraction efficiencyVSAvoiddevice structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The graphene layer performs multiple functions simultaneously: it serves as a transparent electrode for optical access, as a hole extraction contact for carrier collection, and as a low-resistance contact due to its high conductivity. This multi-functionality allows a single added layer to address multiple performance limitations (optical penetration, carrier extraction, and electrical conductivity) without proportionally increasing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The HEMT design achieves low dark current, high signal-to-noise ratio, and ultra-fast response times by extending the effective extraction area and reducing surface recombination, with graphene ensuring transparency and efficient carrier collection.

Implementation Method 1

a polarization charge-induced two-dimensional electron gas formed at an interface between the first layer and the second layer of the heterostructure

Methodology Applied
Scientific EffectPolarization charge-induced two-dimensional electron gas: Polarisation

Implementation Method 2

exposing the layer comprising electrically conducting graphene to incident ultraviolet radiation, wherein at least a portion of the incident ultraviolet radiation passed through the electrically conducting graphene and into the intrinsic semiconductor, generating electron-hole pairs

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS10734537B2High performance, high electron mobility transistors with graphene hole extraction contacts
Publication Date: 2020.08.04 WISCONSIN ALUMNI RES FOUND
  • US10734537B2 patent drawing
  • US10734537B2 patent drawing
  • US10734537B2 patent drawing

AI summary

Radiation detectors based on high electron mobility transistors (HEMTs) are provided. Methods for detecting ultraviolet radiation using the HEMTs are also provided. The transistors are constructed from an intrinsic high bandgap semiconductor material with a built-in polarization field sandwiched between graphene and a two-dimensional electron gas (2DEG).