Graphene Nano-Gap Formation via Feedback-Controlled Electroburning

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for forming graphene nano-gaps lack precise control over the position and size of the gaps, particularly in large-scale fabrication, which is essential for applications requiring reproducible and high-yield graphene electrodes.

Innovation Solution

A feedback-controlled electroburning process is used on specially shaped graphene sheets, where a voltage is applied across a region with a predetermined narrow point, allowing for precise control over the formation of nano-gaps by cracking at the narrowest point, enabling controlled size and position of the gaps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If plasma-etching is used to form nano-gaps, then the position of gaps can be controlled, but the yield is reduced to around 33%

Engineering Contradiction:
Improveposition control of nano-gapsVSAvoiddevice yield
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The fabrication process is divided into two independent stages: first, lithographically define the pattern and perform plasma etching to create a notched shape with a predetermined narrow point; second, apply voltage to induce electroburning that forms the actual nano-gap at the narrowest point. This segmentation allows each stage to optimize for its specific function, achieving both position control and high yield

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The graphene is pre-shaped with a notched geometry that has a predetermined narrow point before the electroburning process. This preliminary shaping ensures that when voltage is applied, the electroburning will occur at the desired location, providing precise position control while maintaining high device yield

Inventive Principle:
Principle #10Preliminary action

2Productivity

If electroburning is used to form nano-gaps, then high yield is achieved, but the position of nano-gaps is not well controlled due to random nature

Engineering Contradiction:
Improvedevice yieldVSAvoidposition control of nano-gaps
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The graphene structure is designed with a notched shape that creates a localized narrow point with specific geometric properties. This local geometric feature concentrates the electroburning effect at the narrowest point, ensuring that the nano-gap forms at the predetermined location rather than randomly, thus achieving both high yield and precise position control

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If over-etching is used to produce nano-gaps less than or equal to a nanometer, then gap size is controlled, but yield is reduced

Engineering Contradiction:
Improvegap size controlVSAvoiddevice yield
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The mechanical plasma etching process is replaced with an electroburning process that uses electrical current to induce controlled breakdown of the graphene lattice. This substitution allows for precise gap size control through voltage parameters while avoiding the yield losses associated with over-etching, as the electroburning process can be precisely controlled to form gaps of the desired size

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method achieves high-yield, reproducible, and precisely controlled nano-gap formation in graphene, suitable for large-scale fabrication and applications such as molecular devices and electronic circuits, with gap sizes ranging from 0.1 to 5 nm.

Implementation Method 1

An alternative approach is based on a process known as electroburning, which relies on the current-induced breakdown of graphene

Methodology Applied
Scientific EffectElectroburning: Avalanche Breakdown

Data Source

PatentUS11198901B2Method for forming nano-gaps in graphene
Publication Date: 2021.12.14 OXFORD UNIVERSITY INNOVATION LTD
  • US11198901B2 patent drawing
  • US11198901B2 patent drawing
  • US11198901B2 patent drawing

AI summary

The present invention relates to a method for forming nano-gaps in graphene. The method may include applying a voltage across a region of graphene such that a nano-gap which extends across the entire width of the graphene is formed, wherein the region across which the voltage is applied may include a point which is the narrowest in the region.