Graphene Film Sensor With Parylene Support for 3D Transfer

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Solution Overview

Problem

Existing methods for forming graphene devices face challenges in transferring graphene layers from a substrate without damaging or degrading their conductivity, particularly when forming three-dimensional structures.

Innovation Solution

A method involving the deposition of a polymer material, such as parylene, over a graphene film using gas phase deposition, which serves as a support for the graphene film, allowing the substrate to be removed through electrochemical delamination or acid etching, thereby preserving the graphene's conductivity and flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If graphene is deposited over a base substrate using CVD, then graphene can be formed with good conductivity, but it is difficult to remove the graphene layer from the base substrate without damaging or polluting the graphene layer and degrading its conductivity

Engineering Contradiction:

Improveconductivity of grapheneVSAvoiddifficulty of removing graphene from substrate

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The patent introduces a polymer layer as an intermediary substance between the graphene film and the base substrate. This polymer layer serves as a mediator that enables easy removal of graphene from the substrate while preserving graphene integrity and conductivity, directly resolving the contradiction between maintaining conductivity and facilitating removal.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the graphene device into distinct layers: the base substrate, the polymer support layer, and the graphene film. This segmentation allows the graphene to be formed on the substrate, transferred to the polymer layer, and then removed from the substrate without damage, solving the removal difficulty while maintaining conductivity.

Inventive Principle:

Principle #1Segmentation

2Adaptability or versatility

If transfer operations are performed to form graphene devices, then graphene can be placed on desired substrates, but the graphene layer may be damaged or polluted during transfer, degrading its conductivity

Engineering Contradiction:

Improveability to place graphene on desired substrateVSAvoidconductivity of graphene

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The polymer layer acts as a protective intermediary during the transfer process, supporting the graphene film and preventing damage or pollution that would occur during direct handling and transfer operations, thus maintaining conductivity while enabling placement on desired substrates.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent uses a thin polymer film that is flexible enough to conform to the graphene layer during transfer operations, providing protection while allowing the graphene to be maneuvered and placed on the target substrate without damage to its conductive properties.

Inventive Principle:

Principle #30Flexible shells and thin films

3Shape

If conventional methods are used to form three-dimensional graphene devices, then complex structures can be achieved, but the process becomes more complex and graphene conductivity may be degraded

Engineering Contradiction:

Improvethree-dimensional structure of deviceVSAvoidcomplexity of formation process

Core Design Contradiction:

ShapeVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by depositing the polymer layer over the graphene film before performing any complex three-dimensional shaping or device formation steps. This preliminary polymer coating protects the graphene and simplifies subsequent processing, reducing overall device complexity while enabling 3D structures.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The polymer film serves as a flexible protective shell that can be conformally deposited over three-dimensional graphene structures, allowing complex 3D device formation while maintaining process simplicity and preserving graphene conductivity through the protective polymer coating.

Inventive Principle:

Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The polymer support maintains the graphene's electrical properties and flexibility, enabling the formation of three-dimensional devices without the need for transfer operations, which reduces degradation and ensures high conductivity and mechanical integrity.

Implementation Method 1

depositing, by gas phase deposition, a polymer material covering a surface of the graphene film

Methodology Applied

Scientific EffectGas phase deposition: Physical Vapour Deposition

Implementation Method 2

removing the substrate from the graphene film, wherein the polymer material forms a support for the graphene film

Methodology Applied

Scientific EffectElectrochemical delamination: Electrolysis

Data Source

PatentUS20250320125A1Sensor device formed from conductive graphene film

Publication Date: 2025.10.16 CENT NAT DE LA RECH SCI (C N R S)

AI summary

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.