Graphene Excitation Electrode for Quartz Crystal Vibrator

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Solution Overview

Problem

Existing quartz crystal vibrators face challenges with frequency fluctuation due to alloying of expensive metals like gold and silver under heat, which affects cost, size reduction, and productivity, especially in smaller devices.

Innovation Solution

The use of a single-layer excitation electrode made from a two-dimensional layered substance such as graphene, silicene, germanene, or stanene, which is thermally and chemically stable, preventing alloying and allowing for reduced size and lower costs while maintaining excellent adhesiveness and electrical characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If gold or silver is used as the main layer of the excitation electrode, then excellent electrical characteristics and chemical stability are achieved, but manufacturing cost significantly increases

Engineering Contradiction:
Improvechemical stabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive noble metals (gold, silver) with inexpensive alternative materials such as aluminum, copper, or their alloys for the excitation electrode. This substitution dramatically reduces manufacturing cost while maintaining adequate electrical characteristics and chemical stability through proper material selection and design optimization.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Strength

If chromium, nickel, or titanium is used as the contact layer to improve adhesiveness, then electrode adhesion to quartz crystal is enhanced, but alloying with the main layer progresses under heat and causes frequency fluctuation

Engineering Contradiction:
ImproveadhesivenessVSAvoidfrequency stability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent eliminates the problematic contact layer entirely by using aluminum or copper directly on the quartz crystal surface. These materials form natural oxide layers that provide adequate adhesion without causing alloying issues. This extraction of the intermediate contact layer removes the source of thermal alloying while maintaining electrode adhesion through direct bonding and oxide formation.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a thin natural oxide layer (Al2O3 or CuO) as an intermediary between the metal electrode and quartz crystal. This oxide layer acts as a diffusion barrier that prevents alloying between the metal and quartz under thermal conditions, while still providing adequate adhesion and electrical contact.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Volume of moving object

If the quartz crystal vibrator element is reduced in size to improve integration, then device compactness is achieved, but the effect of heat-induced alloying becomes more conspicuous

Engineering Contradiction:
Improvedevice sizeVSAvoidfrequency stability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent uses aluminum or copper electrodes that can be deposited in extremely thin layers (tens to hundreds of nanometers) while maintaining adequate electrical performance. This allows for size-reduced vibrator elements with sufficient electrode functionality, as these inexpensive materials do not require thick layers like traditional noble metals to achieve comparable performance.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The natural oxide layer formed by aluminum or copper on the quartz crystal surface serves as a thermal barrier that prevents alloying even in miniaturized devices. This protective oxide intermediary becomes increasingly important as device size decreases, as it maintains frequency stability in compact vibrators where thermal management is more challenging.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration prevents frequency fluctuation, enhances aging resistance, reduces manufacturing costs, and enables smaller device sizes with improved impact resistance and electrical characteristics.

Implementation Method 1

by a voltage being applied to the excitation electrodes, the pair of vibrating arm parts each vibrate with a predetermined resonance frequency

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the two-dimensional layered substance which is thermally and chemically stable, even when being affected by the heat generated during the manufacturing process such as a high-temperature reflow process and the heat under the use environment, the alloying due to metallic diffusion or the like does not occur

Methodology Applied
Scientific EffectThermal stability:

Implementation Method 3

configured to apply an electrical field for exciting the quartz crystal blank to the quartz crystal blank

Methodology Applied
Scientific EffectElectrical field: Electric Field

Data Source

PatentUS20230172070A1Excitation electrode, quartz crystal vibrator element, quartz crystal vibrator, sensor, oscillator, and method of manufacturing quartz crystal vibrator element
Publication Date: 2023.06.01 SII CRYSTAL TECHNOLOGY INC
  • US20230172070A1 patent drawing
  • US20230172070A1 patent drawing
  • US20230172070A1 patent drawing

AI summary

There are provided an excitation electrode, a quartz crystal vibrator element, a quartz crystal vibrator, a sensor, an oscillator, and a method of manufacturing a quartz crystal vibrator element which are not affected by heat in a process or a use environment to surely prevent a frequency fluctuation from occurring, reduction in size of which can be achieved, and which are low in cost and excellent in productivity. The excitation electrodes are disposed on an outer surface of a quartz crystal plate, apply an electrical field for exciting the quartz crystal plate to the quartz crystal plate, have a single layer structure formed of a two-dimensional layered substance, and are used when arranged as a pair so as to be opposed to each other via the quartz crystal plate.