Graphene Film Sensor Transfer Using Parylene Support Layers

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Solution Overview

Problem

The difficulty in transferring graphene layers from a base substrate without damaging or degrading their conductivity, particularly in forming three-dimensional graphene devices, is a challenge in existing methods.

Innovation Solution

A method involving the deposition of a polymer material, such as parylene, over a graphene film using gas phase deposition, which serves as a support for the graphene film, allowing the substrate to be removed through electrochemical delamination or acid etching, thereby preserving the graphene's integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If graphene is transferred from a base substrate using conventional methods, then the graphene layer can be moved to the target substrate, but the graphene layer is damaged or polluted and its conductivity is degraded

Engineering Contradiction:
Improvegraphene transfer processVSAvoidgraphene conductivity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces a polymer support material as an intermediary between the base substrate and the target substrate. This polymer support allows the graphene layer to be transferred without direct contact with the target substrate during the transfer process, preventing damage and pollution that would otherwise degrade conductivity. The polymer acts as a protective mediator throughout the transfer operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies preliminary action by depositing the polymer support material onto the base substrate before forming the graphene layer. This pre-established polymer support structure is designed to facilitate subsequent graphene transfer while protecting the graphene's integrity. The polymer is prepared in advance with specific properties (flexibility, biocompatibility) that will enable damage-free transfer.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If a polymer support is deposited over the graphene film, then the graphene film can be removed from the substrate without damage, but an additional deposition step is required

Engineering Contradiction:
Improvegraphene film integrityVSAvoidnumber of process steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the support function with the transfer function by using the polymer material to serve both purposes simultaneously. The polymer is deposited to support the graphene during formation, then the same polymer enables subsequent transfer by allowing clean separation from the base substrate. This consolidation of functions reduces the need for separate protective measures and simplifies the overall process despite the additional deposition step.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach maintains the conductivity and flexibility of the graphene film by avoiding transfer steps that can degrade its properties, enabling the formation of flexible, biocompatible, and conductive graphene devices, including three-dimensional structures.

Implementation Method 1

depositing, by gas phase deposition, a polymer material covering a surface of the graphene film

Methodology Applied
Scientific EffectGas phase deposition: Physical Vapour Deposition

Implementation Method 2

removing the substrate from the graphene film, wherein the polymer material forms a support for the graphene film

Methodology Applied
Scientific EffectElectrochemical delamination: Electrolysis

Data Source

PatentUS20250320124A1Sensor device formed from conductive graphene film
Publication Date: 2025.10.16 CENT NAT DE LA RECH SCI (C N R S)
  • US20250320124A1 patent drawing
  • US20250320124A1 patent drawing
  • US20250320124A1 patent drawing

AI summary

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.