Graphene Layer Transfer via Polymer Stabilization and Etching

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Solution Overview

Problem

Current methods for transferring graphene layers onto substrates for electron microscopy suffer from incomplete coverage, contamination, and poor reproducibility, leading to suboptimal sample supports that interfere with TEM imaging and other applications.

Innovation Solution

A method involving chemical vapor deposition of graphene on a metal foil, stabilization with a cellulose-based polymer, etching to remove the metal, and gentle deposition onto a target substrate, followed by dry cleaning to remove the polymer, ensuring a clean, uniform, and intact graphene layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional amorphous carbon-based supports are used, then sample support structure is provided, but background signal is significant and manufacturing reproducibility is poor

Engineering Contradiction:
Improvemanufacturing reproducibilityVSAvoidbackground signal
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the material parameter from conventional amorphous carbon to graphene, which fundamentally alters the background signal characteristics. Graphene's atomic thickness and crystalline structure provide a periodic pattern that can be easily distinguished and subtracted, transforming the harmful background signal into a manageable artifact while improving manufacturing reproducibility through standardized transfer processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures by combining graphene layers with support grids, creating a hybrid system that leverages the unique properties of graphene (atomic thickness, crystalline structure, high conductivity) while maintaining the mechanical support function of the grid structure. This composite approach resolves the contradiction by providing both low background signal and structural reliability

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If graphene is transferred using conventional methods, then graphene layer is obtained, but coverage is incomplete and contamination occurs

Engineering Contradiction:
Improvegraphene layer coverageVSAvoidcontamination
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent introduces an intermediary transfer mechanism that facilitates the movement of graphene from the growth substrate to the final support structure. This intermediary process enables controlled transfer, ensuring complete coverage while minimizing contamination through carefully managed interface interactions during the transfer sequence

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent performs preliminary actions by pre-preparing the graphene layer on a growth substrate with controlled properties before transfer. This preliminary preparation ensures that the graphene is in an optimal state for transfer, enabling complete coverage and reducing contamination risks during the subsequent transfer process to the final support structure

Inventive Principle:
Principle #10Preliminary action

3Object-generated harmful factors

If graphene layer is made thinner to reduce background signal, then background signal decreases, but layer integrity and flatness become difficult to maintain

Engineering Contradiction:
Improvebackground signalVSAvoidlayer flatness and integrity
Core Design Contradiction:
Object-generated harmful factorsVSManufacturing precision

Solution Approach 1:

The patent changes the structural parameter of the graphene layer to achieve atomic thickness (single-layer or few-layer configuration), which minimizes background signal to the theoretical minimum. Simultaneously, the transfer process parameters are optimized to maintain integrity and flatness, resolving the contradiction by achieving the thinnest possible layer while preserving quality through controlled transfer mechanics

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves high-quality graphene samples with improved coverage, reduced contamination, and enhanced reproducibility, resulting in lower background signals and better imaging quality in electron microscopy and other applications.

Implementation Method 1

stabilizing the graphene layer by applying a layer of a cellulose-based polymer onto the graphene layer

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

placing the metal foil having respectively the graphene layer and the cellulose-based polymer layer stacked thereon in or on an etching solution to dissolve the metal foil supporting the graphene layer

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 3

dry cleaning the target substrate or structure with the graphene layer deposited thereon to remove the cellulose-based polymer layer by embedding the target substrate or structure with the graphene layer in activated carbon and heating the activated carbon

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 4

heating the activated carbon

Methodology Applied
Scientific EffectPyrolysis: Pyrolysis

Data Source

PatentEP4011828A1Graphene layer transfer method
Publication Date: 2022.06.15 UNIVERSITEIT ANTWERPEN
  • EP4011828A1 patent drawingFigure 1
  • EP4011828A1 patent drawingFigure 2~3
  • EP4011828A1 patent drawingFigure 4~10

AI summary

The present invention relates to a method (1) of transferring a graphene layer onto a target substrate or support structure. The method comprises obtaining (2) a metal foil (12) onto which the graphene layer (11) is provided, stabilizing the graphene layer (11) by applying (4) a layer (13) of a cellulose-based polymer onto the graphene layer (11), and placing (5) the metal foil (12) with the graphene and the polymer layers in or on an etching solution (25) to dissolve the metal foil (12) supporting the graphene layer (11). The method comprises diluting and/or neutralizing (6) the etching solution (25) after the metal foil (12) has been dissolved, and depositing (7) the graphene layer (11) onto the target (20) by placing (27) the target underneath the graphene layer and removing (28) the diluted and/or neutralized solution until the graphene layer settles onto the target. The method comprises a dry cleaning (10) of the target to remove the polymer layer (13) by embedding the target in activated carbon (31) and heating.