In Situ Graphene Synthesis on Waveguides Using Nickel Films

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Solution Overview

Problem

Current methods for integrating graphene into photonic devices face challenges such as material damage and inefficient synthesis processes, particularly in ultrafast optical switches and pulse lasers, due to the need for transfer processes that compromise the quality of graphene and require complex semiconductor processes or high temperatures.

Innovation Solution

A method for in situ synthesis of graphene along the lengthwise direction of waveguides using a telecommunication laser and a nickel thin film, allowing graphene growth at a desired location without the need for transfer, using the evanescent field to interact with the nickel layer and deposit carbon atoms, enabling the formation of high-quality graphene on optical waveguides.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a transfer process is used to integrate graphene into photonic devices, then graphene can be placed on the device surface, but the graphene structure is damaged physically and chemically causing quality degradation

Engineering Contradiction:
Improvegraphene integrationVSAvoidgraphene quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies preliminary action by depositing the nickel thin film containing carbon atoms onto the waveguide surface before the actual graphene synthesis. This pre-positioning of carbon source material enables subsequent in-situ graphene growth directly at the desired location through laser irradiation, eliminating the need for transfer processes that would damage the graphene structure and compromise its quality.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements self-service by enabling the waveguide structure itself to serve as the substrate for graphene synthesis. The nickel thin film deposited on the waveguide provides the carbon atoms needed for graphene formation when irradiated by laser, allowing the system to generate its own graphene material in-situ without requiring external transfer processes, thus preserving graphene quality while facilitating integration.

Inventive Principle:
Principle #25Self-service

2Reliability

If conventional synthesis methods are used, then graphene can be grown on a substrate, but complex semiconductor processes or high temperatures are required

Engineering Contradiction:
Improvegraphene qualityVSAvoidsynthesis process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical and thermal synthesis systems with an optical system. Instead of using conventional chemical vapor deposition requiring high temperatures and complex semiconductor processes, the invention uses laser irradiation (optical energy) to heat and synthesize graphene in-situ at lower temperatures, significantly simplifying the synthesis process while maintaining graphene quality.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent applies parameter changes by utilizing the localized heating effect of laser irradiation to achieve the high temperatures needed for graphene synthesis only at the specific location where graphene is desired, rather than heating the entire substrate. This localized parameter change enables simplified processing conditions while maintaining high graphene quality.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If graphene is transferred to a target photonic device, then integration is achieved, but the process is not suitable for placing graphene in necessary local parts of an integrated photonic device

Engineering Contradiction:
Improvegraphene integrationVSAvoidlocal placement capability
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent applies local quality by enabling graphene synthesis to occur only at specific localized regions of the waveguide where the nickel thin film has been deposited. The laser irradiation can be precisely targeted to synthesize graphene at the exact location needed for the photonic device functionality, providing spatial control and adaptability that transfer processes cannot achieve.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses preliminary action by pre-depositing the nickel thin film containing carbon atoms at the specific location where graphene is needed before laser irradiation. This pre-positioning enables precise local placement of graphene at the desired site on the waveguide, making the process adaptable to different integration locations without requiring transfer operations.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the fabrication of high-quality graphene-based devices without transfer processes, enabling flexible substrate application, avoiding material damage, and achieving ultrafast optical nonlinearity for advanced photonic devices like ultrafast optical switches and femtosecond lasers.

Implementation Method 1

processing an evanescent field of laser propagating in the waveguide

Methodology Applied
Scientific EffectEvanescent field:

Implementation Method 2

growing graphene between the surface of the waveguide and the nickel thin film by irradiating telecommunication laser to a core of the waveguide

Methodology Applied
Scientific EffectLaser heating: Heating

Implementation Method 3

depositing a nickel thin film on a surface of the waveguide, growing graphene between the surface of the waveguide and the nickel thin film

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Data Source

PatentUS10461492B2Method for Synthesis of graphene along waveguides in situ, photonics device including graphene obtained using the method
Publication Date: 2019.10.29 KOREA INST OF SCI & TECH
  • US10461492B2 patent drawing
  • US10461492B2 patent drawing
  • US10461492B2 patent drawing

AI summary

A method for in situ synthesis of graphene along a lengthwise direction of a waveguide applied to a photonic device includes processing an evanescent field of laser propagating in the waveguide to spread outward the waveguide, depositing a nickel thin film on a surface of the waveguide, growing graphene between a surface of the waveguide and a nickel thin film by irradiating telecommunication laser to a core of the waveguide, and removing the nickel thin film from the waveguide. Accordingly, graphene with high optical nonlinearity is in situ synthesized in the photonic device.