Graphical Control Flow Evaluation for Semiconductor Process Strategies

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Solution Overview

Problem

Current analysis tools for semiconductor manufacturing lack flexibility and customization options, requiring significant redevelopment for minor changes and not supporting graphical visualization of control flows, which hinders efficient evaluation and implementation of new control strategies.

Innovation Solution

A user interface and control strategy evaluation tool that allows users to design and configure control process flows modularly, with freely configurable control elements and data elements, enabling intuitive building and visualization of control strategies, and an advisor module for recommending optimal control elements and settings.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If pre-defined control strategies are used in analysis tools, then the manufacturing process can be optimized, but the tools lack flexibility and require significant redevelopment for minor changes

Engineering Contradiction:

Improveprocess optimization capabilityVSAvoidflexibility of control strategy evaluation

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The control strategy is divided into discrete control elements that can be independently selected and configured. Each control element represents a specific control action or parameter, allowing users to build customized control strategies by combining different elements without requiring tool redevelopment.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The control strategy configuration is made dynamic and adaptable through a user interface that allows real-time modification of control elements and their parameters. This enables the system to adapt to different manufacturing scenarios and changes without requiring software redevelopment.

Inventive Principle:

Principle #15Dynamics

2Manufacturing precision

If complex control strategies are implemented, then manufacturing precision improves, but the complexity of designing and evaluating these strategies increases

Engineering Contradiction:

Improvepattern reproduction accuracyVSAvoidcontrol flow design complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

A graphical user interface acts as an intermediary between the user and the complex control strategy evaluation system. This interface provides visual tools for designing, configuring, and evaluating control flows, making complex operations accessible without requiring extensive coding or deep technical expertise.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Pre-defined control elements and templates can be copied and reused across different control strategies. This allows complex control patterns to be replicated and modified easily, reducing the effort required to design sophisticated control flows while maintaining manufacturing precision.

Inventive Principle:

Principle #26Copying

3Reliability

If traditional analysis tools are used, then evaluation of control strategies is possible, but graphical visualization of control flows is not supported

Engineering Contradiction:

Improvecontrol strategy evaluation capabilityVSAvoidintuitiveness of control flow design

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The traditional text-based or code-based control strategy design approach is replaced with a graphical user interface system. This substitution provides visual representation and manipulation of control flows, making the system easier to operate and understand while maintaining full evaluation capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentEP3657281B1Control strategy evaluation tool for a semiconductor manufacturing process and its user interface

Publication Date: 2022.11.30 ASML NETHERLANDS BV

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AI summary

Described is a user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising: a library of control elements comprising at least a control element representing a task of simulation and each control element being selectable by a user; a control flow editor configured to organize said control elements into a control flow representing the control strategy; and a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.