Graphite Article Electromagnetic Measurement for SiC Ingot Growth

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Solution Overview

Problem

The existing methods for measuring the electromagnetic properties of graphite articles, such as ingot growing containers and insulating materials, are inefficient and time-consuming, affecting the reproducibility of ingot growth in induction heating processes.

Innovation Solution

A method and apparatus that measure electromagnetic properties by arranging a graphite article within a coil with a winded conducting wire and applying power to induce and measure electromagnetic properties, specifically equivalent series resistance, equivalent series inductance, and quality factor, using an LCR meter, allowing for quick and simplified selection of optimal graphite articles for improved ingot growth reproducibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional measurement methods are used to measure electromagnetic properties of graphite articles, then measurement accuracy can be maintained, but measurement time increases and productivity decreases

Engineering Contradiction:
Improveelectromagnetic properties measurement accuracyVSAvoidmeasurement efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent extracts only the essential electromagnetic properties (equivalent series resistance, equivalent series inductance, quality factor) that need to be measured for ingot growing container selection, eliminating unnecessary measurement steps and focusing on critical parameters that directly affect induction heating performance and ingot growth reproducibility

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The measurement apparatus is designed to measure multiple electromagnetic properties (resistance, inductance, quality factor) using a single integrated system with a coil and LCR meter, allowing comprehensive characterization of graphite articles through one universal measurement process rather than multiple separate measurements

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If comprehensive electromagnetic properties measurement is performed, then reproducibility of ingot growth can be improved, but measurement complexity and device complexity increase

Engineering Contradiction:
Improveingot growth reproducibilityVSAvoidmeasurement apparatus complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces complex physical testing and empirical evaluation methods with electromagnetic field-based measurement using a coil and LCR meter, substituting mechanical/manual assessment systems with automated electrical measurement systems that directly quantify the electromagnetic properties critical for induction heating performance

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The measurement system characterizes graphite articles by measuring three key electromagnetic parameters (equivalent series resistance, equivalent series inductance, quality factor) that directly correlate with induction heating characteristics, transforming the selection criteria from qualitative/empirical to quantitative/parameter-based for improved reproducibility

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If electromagnetic properties are measured using the coil and LCR meter system, then selection of optimal graphite articles is simplified, but time consumption for measurement increases

Engineering Contradiction:
Improvegraphite article selection simplicityVSAvoidmeasurement time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent performs preliminary measurement of electromagnetic properties (equivalent series resistance, equivalent series inductance, quality factor) before the actual ingot growing process, allowing optimal graphite articles to be selected in advance based on measured parameters, so that during the growing process no time is lost in selecting or adjusting materials

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The measurement system creates an electromagnetic property profile or 'fingerprint' of each graphite article through the coil-LCR meter measurement, allowing selection based on measured parameter values that represent the article's heating characteristics, replacing time-consuming trial-and-error physical testing with rapid parameter comparison

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reliable and efficient measurement of electromagnetic properties, predicting thermal and resistance properties, and securing higher reproducibility in ingot growth by selecting graphite articles with advantageous characteristics, thereby enhancing the growth rate and quality of silicon carbide ingots.

Implementation Method 1

Induction heating is a method of supplying high frequency alternating current to a coil and heating the object to be heated using Joule heating caused from an eddy current generated from electromagnetic induction action

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

heating the object to be heated using Joule heating caused from an eddy current generated from electromagnetic induction action

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 3

heating the object to be heated using Joule heating caused from an eddy current generated from electromagnetic induction action

Methodology Applied
Scientific EffectEddy current: Eddy Currents

Data Source

PatentEP3961200A1Method of measuring a graphite article, apparatus for a measurement, and ingot growing system
Publication Date: 2022.03.02 SENIC INC
  • EP3961200A1 patent drawingFigure 1
  • EP3961200A1 patent drawingFigure 2
  • EP3961200A1 patent drawingFigure 3(a)~3(c)

AI summary

Example embodiments relate to a method of measurement, an apparatus for measurement, and an ingot growing system that measure properties relating an induction heating characteristic of a graphite article. The method of measurement comprises an arranging step of arranging a graphite article to the coil comprising a winded conducting wire; and a measuring step of applying power for measurement to the coil through means of measurement connected electronically to the coil, and measuring electromagnetic properties induced in the coil. The method of measurement and the like measure electromagnetic properties of graphite articles like an ingot growing container, and an insulating material, and provide data required for selecting so that further enhanced reproducibility for growth of an ingot can be secured.