Grating Biochip Inspection via Angular Scatterometry
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Solution Overview
Problem
Conventional biochip inspection methods, such as fluorescence and prism coupled surface plasma resonance (SPR), face issues with high costs, sample contamination, and limitations in simultaneous multi-sample analysis due to the need for metal coatings and complex labeling processes.
Innovation Solution
The method employs an angular scatterometer with a grating biochip structure, utilizing a semiconductor substrate, periodic gratings, and a dielectric layer, optimized using the rigorous coupled wave algorithm (RCWA) to enhance detection sensitivity and reduce fabrication costs, allowing for mass production and quick inspection without metal coatings or fluorescence labeling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If prism coupled SPR is used for label-free biochip inspection, then detection sensitivity is improved, but fabrication cost increases due to metal film coating requirement
Solution Approach 1:
The invention extracts and eliminates the metal film coating step from the SPR inspection system. By using grating coupled SPR instead of prism coupled SPR, the method achieves the same detection sensitivity without requiring expensive metal film deposition processes, thus removing the source of high fabrication costs while preserving the core sensing functionality.
Solution Approach 2:
The invention changes the fundamental operating parameters of the SPR system by transitioning from prism-based excitation to grating-based excitation. This parameter change modifies the coupling mechanism and eliminates the need for metal films, thereby reducing fabrication costs while maintaining detection sensitivity through optimized grating structures.
2Reliability
If prism coupled SPR is used for biochip inspection, then label-free measurement is achieved, but productivity decreases since only one single sample can be measured at a time
Solution Approach 1:
The grating coupled SPR system is designed with universal applicability for measuring multiple samples simultaneously. The grating structure allows parallel interrogation of multiple biochip samples on a single substrate, enabling the system to perform both label-free measurement and mass measurement functions, thereby achieving multi-functionality that resolves the productivity limitation.
3Measurement precision
If conventional fluorescence inspection is used, then detection sensitivity is improved, but device complexity increases due to complicated fluorescence labeling experiment
Solution Approach 1:
The invention extracts and removes the fluorescence labeling step from the inspection process. By employing grating coupled SPR, the system achieves detection sensitivity comparable to fluorescence methods while eliminating the complex labeling procedures, thereby reducing device complexity and experimental workflow complexity without sacrificing measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach achieves higher detection sensitivity and lower fabrication costs than prism coupled SPR, enabling mass and quick biochip inspections with multiple samples on a single substrate, while omitting the need for complex labeling and metal coatings, thus improving reliability and efficiency.
Implementation Method 1
irradiating a grating biochip using a light beam, measuring a diffracted light using a photodetector, wherein the diffracted light is generated by the light beam passing the grating biochip
Implementation Method 2
surface plasma resonance (SPR) attracts much attention due to its good detection sensitivity, Recently, label-free inspection methods have been proposed in succession, wherein the surface plasma resonance (SPR) attracts much attention
Data Source
AI summary
A method for inspecting a grating biochip comprises the steps of irradiating a grating biochip using a light beam, measuring a diffracted light using a photodetector, selecting a plurality of parameters of the grating biochip, and optimizing the parameters to enhance the detection sensitivity, wherein the diffracted light is generated by the light beam passing the grating biochip. The grating biochip comprises a grating structure including a semiconductor substrate, a grating positioned on the semiconductor substrate and a dielectric layer covering the grating and the semiconductor substrate. The sample of the biochip is positioned on the grating structure.