Grating Coupler Segments with Inverted Curvature

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Solution Overview

Problem

Conventional grating couplers in photonics chips suffer from low efficiency, lack of compactness, and are not robust to fabrication variability, limiting their performance in applications such as LIDAR systems and silicon photonics phased arrays.

Innovation Solution

A grating coupler structure comprising multiple inclined segments with alternating curved sections, where each segment includes a first curved section and a second curved section with inverted curvature, optimized for improved coupling efficiency and robustness through precise material selection and patterning processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional grating coupler structures are used, then the device complexity is low, but the coupling efficiency is low and the footprint is large

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidgrating coupler structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The grating coupler is divided into multiple segments along its length, with each segment containing alternating curved and inverted curved sections. This segmentation allows independent optimization of each section's curvature to enhance coupling efficiency while maintaining overall structural manageability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The grating coupler incorporates sections with alternating curvatures (first curvature and inverted curvature) rather than straight or uniformly curved designs. This alternating curvature pattern optimizes light coupling by creating favorable phase matching conditions across different segments

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Reliability

If conventional grating coupler structures are used, then the manufacturing process is simple, but the tolerance to fabrication variations is poor

Engineering Contradiction:
Improvetolerance to fabrication variationsVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

Different segments of the grating coupler have locally optimized curvature characteristics - some sections have first curvature while others have inverted curvature. This local variation in geometric properties allows the structure to compensate for fabrication variations in different regions, improving overall robustness

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The design employs alternating curvature parameters (first curvature and inverted curvature) across different segments. By varying the curvature parameter sign and magnitude in different locations, the structure becomes less sensitive to absolute dimensional variations during fabrication

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If conventional grating coupler structures are used, then the layout area is large, but the structural simplicity is maintained

Engineering Contradiction:
Improvefootprint reductionVSAvoidgrating coupler structure complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The alternating curved and inverted curved sections enable the grating coupler to achieve compact folding or bending configurations. This allows the optical path to be contained within a smaller footprint area while maintaining the necessary interaction length for efficient coupling

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed structure enhances coupling efficiency, reduces footprint, and increases tolerance to fabrication variations, resulting in improved performance and reliability for photonics chips.

Implementation Method 1

Grating couplers can direct laser pulses off-chip at a given emission angle or receive laser pulses

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS11474294B2Grating couplers with segments having sections of inverted curvature
Publication Date: 2022.10.18 GLOBALFOUNDRIES US INC
  • US11474294B2 patent drawing
  • US11474294B2 patent drawing
  • US11474294B2 patent drawing

AI summary

Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are spaced along a longitudinal axis. Each segment is inclined relative to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature that is inverted relative to the first curvature.