Integrated Grating Coupler Photodetector for Selective Light Coupling

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Solution Overview

Problem

Existing photonic chips require improved structures for photodetectors and grating couplers to enhance light coupling efficiency and wavelength selectivity, particularly in data communication and computation systems.

Innovation Solution

A photonic chip structure incorporating a first photodetector with a semiconductor layer and a grating coupler, featuring a waveguide core laterally spaced from the coupler, and a pad with sub-wavelength grooves and segments filled with dielectric material, enabling contra-directional coupling and high wavelength selectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional photodetector structures are used, then the device can perform basic light detection, but the coupling efficiency is low and the footprint is large

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidfootprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent merges the grating coupler and photodetector into a single integrated structure where the grating coupler is formed directly adjacent to the photodetector's semiconductor layer. This integration eliminates the need for separate coupling components and reduces the overall footprint while improving coupling efficiency through direct optical path coupling.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from planar photodetector structures to three-dimensional stacked architectures by positioning the grating coupler in a different spatial layer adjacent to the semiconductor layer. This vertical integration approach reduces the lateral footprint while maintaining or enhancing coupling efficiency through optimized optical path geometry.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If conventional grating coupler designs are used, then the structure can be formed, but wavelength selectivity is insufficient

Engineering Contradiction:
Improvewavelength selectivityVSAvoidstructure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements local quality by varying the periodicity, depth, and width of grating structures at different locations within the coupler. These localized modifications enable wavelength-selective coupling without requiring complex external filtering components, as each grating region is optimized for specific wavelength ranges.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent achieves wavelength selectivity by changing physical parameters of the grating structure including period spacing, groove depth, and fill factor. These parameter variations allow the same grating coupler structure to selectively couple different wavelengths, providing adaptability without increasing overall device complexity.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If photodetectors are integrated with grating couplers, then coupling efficiency improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidalignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by forming the grating coupler structure first, then using it as a reference template for subsequent photodetector alignment. This sequential fabrication approach with built-in registration features ensures precise alignment without requiring post-fabrication adjustment, thereby maintaining high coupling efficiency while managing manufacturing precision requirements.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure achieves high coupling efficiency and selective wavelength reflection, reducing the footprint compared to traditional designs like Mach-Zehnder interferometers, facilitating compact and efficient data processing.

Implementation Method 1

enabling contra-directional coupling and high wavelength selectivity

Methodology Applied
Scientific EffectContra-directional coupling:

Implementation Method 2

first grating coupler may include a plurality of grooves in the pad and a plurality of segments between the plurality of grooves; each groove may be disposed between an adjacent pair of the plurality of segments; the plurality of segments may be dimensioned and positioned to define a sub-wavelength grating

Methodology Applied
Scientific EffectDiffraction grating: Diffraction Grating

Implementation Method 3

A photodetector may be employed in the photonic integrated circuit to convert light, which may be modulated as an optical signal, into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 4

the plurality of segments may be dimensioned and positioned to define a sub-wavelength grating, and the plurality of grooves may be filled by a dielectric material

Methodology Applied
Scientific EffectSub-wavelength grating: Diffraction Grating

Data Source

PatentEP4707883A1Photodetectors with an integrated grating coupler
Publication Date: 2026.03.11 GLOBALFOUNDRIES US INC
  • EP4707883A1 patent drawingFigure 1
  • EP4707883A1 patent drawingFigure 2~2A
  • EP4707883A1 patent drawingFigure 2B~3

AI summary

Structures for a photonic chip that include a photodetector and a grating coupler, and methods of forming such structures. The structure comprises a photodetector including a semiconductor layer, and a grating coupler adjacent to the semiconductor layer of the photodetector. The structure further comprises a waveguide core including a portion that is laterally spaced from the grating coupler.