Grating Coupler Spot-Size Conversion for Waveguide Integration

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Solution Overview

Problem

Conventional optical coupling mechanisms for integrating light into planar waveguides on semiconductor chips are inefficient due to size mismatch between optical fibers and waveguides, requiring large dimensions and separate devices for grating couplers and adiabatic tapers, which complicates wafer testing and area usage.

Innovation Solution

An optical coupling device with a grating portion featuring essentially straight and parallel scattering elements of varying lengths, allowing for efficient coupling of light into waveguides without the need for cleaved facets or multiple layers, facilitating wafer testing and reducing device area through standard lithography processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional grating couplers with attached linear tapers are used, then light coupling efficiency is improved, but device area increases significantly due to the large grating array and additional taper length

Engineering Contradiction:
Improvelight coupling efficiencyVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent combines the grating coupler and spot-size converter functions into a single integrated device. The grating elements directly provide both the coupling function and the mode size conversion function, eliminating the need for separate adiabatic taper structures. This merging reduces the overall device area while maintaining coupling efficiency.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The grating elements are designed to perform multiple functions simultaneously: they act as both the coupling interface for incident light and as the spot-size converter to match the waveguide mode. This multi-functionality eliminates the need for additional dedicated taper structures, thereby reducing the total device footprint.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If cleaved facets with polymer tapers are used for coupling, then light coupling efficiency is improved, but lateral in-plane coupling becomes inconvenient for wafer testing

Engineering Contradiction:
Improvelight coupling efficiencyVSAvoidwafer testing convenience
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent transitions from lateral in-plane coupling to vertical coupling by designing the grating elements to couple light from the vertical direction (from optical fibers) directly into the planar waveguide on the wafer surface. This dimensional change enables convenient wafer testing while maintaining coupling efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Manufacturing precision

If standard lithography processes are used with varying thickness gratings, then manufacturing precision improves, but additional deposition and etch steps are required

Engineering Contradiction:
Improvegrating structure precisionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent segments the grating structure into multiple discrete elements with different lengths, where each segment corresponds to a different optical path length. This segmentation allows the use of standard lithography processes to define the pattern, while the varying effective thickness is achieved through the geometric configuration of the grating elements themselves rather than requiring multiple deposition layers with different thicknesses.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables compact, efficient coupling of light into waveguides with reduced area requirements, allowing for perpendicular or angled coupling, and integrates spot-size conversion and grating functions in a single device, facilitating high-density chip-to-chip interconnects and wafer testing.

Implementation Method 1

A grating coupler includes an array of parallel grating elements which are arranged on a substrate. Incident light, for example stemming from an optical fiber, is radiated perpendicularly or at an angle greater than zero degrees onto the grating plane. Through scattering, the light can than be coupled into the plane of the grating and fed into a photonic waveguide on the substrate.

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS8520991B2Optical coupling method
Publication Date: 2013.08.27 GLOBALFOUNDRIES US INC
  • US8520991B2 patent drawing
  • US8520991B2 patent drawing
  • US8520991B2 patent drawing

AI summary

A method of coupling a light beam into a waveguide. The method includes applying the light beam onto a grating portion at non-zero degree angle with respect to a plane of the grating portion, coupling the light beam into the waveguide using the grating portion and converting a spot-size of the light beam to correspond with a size of the waveguide using the grating portion.