Grating Cover Layer Refractive Index Control for Semiconductor Laser Efficiency

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Solution Overview

Problem

Existing semiconductor lasers with diffraction gratings face challenges in achieving high laser output efficiency and temperature characteristics due to limitations in the refractive index difference and grating depth, particularly when reducing the size of the resonator length.

Innovation Solution

A grating layer with a projection-recess structure is designed using a group III-V semiconductor, where the cover layer has a different refractive index than the base layer, allowing for increased refractive index difference and coupling coefficient, achieved by varying the Al compositional ratio in the AlGaAs material to enhance the effective refractive index difference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the resonator length is reduced to miniaturize the semiconductor laser, then the device size is decreased, but the laser output efficiency deteriorates due to insufficient refractive index difference and grating depth

Engineering Contradiction:
Improvedevice sizeVSAvoidlaser output efficiency
Core Design Contradiction:
Volume of moving objectVSLoss of energy

Solution Approach 1:

The grating cover layer is designed with spatially varying compositional ratios: a first region with higher Al composition (lower refractive index) and a second region with lower Al composition (higher refractive index). This local differentiation creates enhanced refractive index contrast at the grating interface, improving light coupling efficiency and compensating for the reduced resonator length.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent varies the compositional parameters of the AlGaAs material system to optimize optical performance. By adjusting the Al composition ratio in different regions of the grating cover layer, the refractive index is precisely controlled to maximize the coupling coefficient between the waveguide and grating, thereby maintaining high laser output efficiency in a miniaturized device.

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If the Al compositional ratio is increased to enhance the refractive index difference, then the coupling coefficient is improved, but the material composition uniformity becomes more difficult to control

Engineering Contradiction:
Improvecoupling coefficientVSAvoidcompositional ratio control
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The grating cover layer is segmented into distinct regions with different Al compositional ratios. This segmentation allows independent optimization of each region's composition to achieve the desired refractive index profile, while the overall structure maintains manufacturability through systematic composition control rather than requiring precise control of a single uniform composition.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design results in a semiconductor laser with improved laser output efficiency and reliability, capable of emitting a laser beam with a shorter wavelength when combined with a second harmonic generation element, such as a green laser operating in the 530 nm range.

Implementation Method 1

the grating cover layer includes a first region which is disposed over recessed portions of the grating base layer and which has a compositional ratio of a group III-V semiconductor having a first refractive index, and a second region which is disposed over projecting portions of the grating base layer and which has a compositional ratio of a group III-V semiconductor having a second refractive index that is smaller than the first refractive index

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

A laser beam is oscillated by utilizing recombination light emission of carriers injected into the active layer

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Implementation Method 3

A laser beam is oscillated by utilizing recombination light emission of carriers injected into the active layer and optical resonance using cleaved end faces, a diffraction grating, or the like

Methodology Applied
Scientific EffectOptical resonance: Resonance

Implementation Method 4

A laser beam is oscillated by utilizing recombination light emission of carriers injected into the active layer and optical resonance using cleaved end faces, a diffraction grating, or the like

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS8891159B2Optical semiconductor element, semiconductor laser, and method of manufacturing optical semiconductor element
Publication Date: 2014.11.18 FUJITSU LTD
  • US8891159B2 patent drawing
  • US8891159B2 patent drawing
  • US8891159B2 patent drawing

AI summary

An optical semiconductor element includes: a grating base layer including a projection-recess structure disposed over a substrate; and a grating cover layer including a group III-V semiconductor having three or more elements, wherein the grating cover layer includes a first region which is disposed over recessed portions of the grating base layer and which has a compositional ratio of a group III-V semiconductor having a first refractive index, and a second region which is disposed over projecting portions of the grating base layer and which has a compositional ratio of a group III-V semiconductor having a second refractive index that is smaller than the first refractive index, wherein the grating base layer includes a group III-V semiconductor having a third refractive index that is smaller than the first refractive index.