2D Grating Diffraction Intensity Variation Measurement

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Solution Overview

Problem

Current methods for determining the morphology of nanostructured objects, such as thin layers and networks, using CD-SAXS are time-consuming due to the need for multiple diffraction patterns at various angles, requiring over 45 hours for acquisition and processing.

Innovation Solution

A method involving continuous rotation of a two-dimensional grating around a given direction, acquiring a single diffraction pattern that includes concentric ellipses, allowing direct extraction of intensity variation as a function of rotation, which can be linked to position along the qz direction, significantly reducing acquisition time and complexity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple diffraction patterns are acquired at different rotation angles using CD-SAXS, then the three-dimensional morphology reconstruction accuracy is improved, but the acquisition time increases to over 45 hours

Engineering Contradiction:
Improvemorphology reconstruction accuracyVSAvoidacquisition time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent segments the continuous rotation acquisition into discrete angular positions, acquiring diffraction patterns at specific angles (e.g., every 1° from -45° to 45°). This segmentation allows for systematic data collection that ensures complete morphological information while enabling efficient processing and reconstruction algorithms to work with discrete data points rather than continuous streams.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary actions by pre-positioning the sample at specific rotation angles before acquiring each diffraction pattern. The sample is systematically rotated to predetermined angular positions, and diffraction patterns are acquired at these pre-planned positions. This preliminary positioning ensures that all necessary morphological information is captured without requiring continuous adjustment during acquisition, thereby reducing total acquisition time while maintaining reconstruction accuracy.

Inventive Principle:
Principle #10Preliminary action

2Loss of information

If multiple diffraction patterns are acquired at different angles, then the completeness of reciprocal space reconstruction is improved, but the device complexity and operational complexity increase

Engineering Contradiction:
Improvereciprocal space completenessVSAvoidsystem complexity
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent employs a universal sample holder design that can accommodate different sample types and orientations while performing the same function of holding and rotating the sample. The rotation stage and detector system are designed to be multi-functional, capable of handling various diffraction geometries and sample configurations. This universality reduces the need for multiple specialized devices, thereby reducing overall system complexity while ensuring complete reciprocal space coverage.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent transitions from two-dimensional diffraction patterns to three-dimensional reciprocal space reconstruction by adding the rotation angle dimension. By rotating the sample around the incident beam direction and collecting diffraction patterns at multiple angles, the system effectively adds a rotational dimension to the data collection, enabling complete three-dimensional morphological reconstruction without requiring complex additional hardware beyond the rotation stage.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If diffraction patterns are acquired every 1° over a 90° range, then the angular resolution is improved, but the acquisition time increases to over 45 hours

Engineering Contradiction:
Improveangular resolutionVSAvoidacquisition speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent implements periodic action by acquiring diffraction patterns at regular angular intervals (every 1°) throughout the rotation range. This periodic sampling strategy ensures consistent angular resolution while maintaining a systematic acquisition rhythm. The regular intervals allow for efficient data processing and reconstruction algorithms that can leverage the periodic nature of the data collection, improving productivity compared to irregular or continuous acquisition methods.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent maintains continuity of useful action by performing the sample rotation and diffraction pattern acquisition in a continuous, uninterrupted sequence. The sample is rotated continuously through the angular range, with diffraction patterns acquired at predetermined intervals without stopping the rotation mechanism. This continuous operation eliminates idle time between measurements and maximizes the productivity of the acquisition system while maintaining high angular resolution through systematic sampling.

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables faster and simpler determination of intensity variation diffracted by a two-dimensional grating, facilitating quicker three-dimensional morphology reconstruction of nanostructured objects, reducing acquisition time from hours to a fraction of the original duration.

Implementation Method 1

determining, by transmission diffraction of an incident beam, the variation in intensity diffracted by a two-dimensional grating

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentEP3517940B1Method and system for determining the variation in diffraction intensity of a two-dimensional grating along a given direction
Publication Date: 2020.08.19 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP3517940B1 patent drawingFigure 1~2
  • EP3517940B1 patent drawingFigure 3~5
  • EP3517940B1 patent drawingFigure 6~7

AI summary

Method for determining, by transmission diffraction of an incident beam, the variation in intensity diffracted by an organized two-dimensional grating of a sample (E) in a given direction (qz) orthogonal to the plane of the two-dimensional grating, comprising: - setting up the sample (E) containing the organized two-dimensional grating so that the given direction (qz) forms an angle (ψ) with the direction of the incident beam, - rotating the organized two-dimensional grating around the given direction (qz), - acquiring a diffraction image for at least a quarter revolution of the organized two-dimensional grating around the given direction (qz), - stopping the rotation, - extracting the variation in intensity diffracted in the given direction (qz).