Grid Rail Transfer Robot for Semiconductor Article Handling
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Solution Overview
Problem
In semiconductor manufacturing plants, overhead hoist transport systems face congestion and space constraints due to limited paths for article transfer and storage, making efficient article handling and storage challenging.
Innovation Solution
An article transfer and storage apparatus featuring a transfer robot that moves on a grid-patterned travel rail, equipped with a battery charged by electromagnetic induction from power transmission rails, and storage shelves below, allowing flexible movement and efficient charging while minimizing congestion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If vehicles move only along a predetermined path in the OHT apparatus, then the system structure is simple, but congestion occurs and storage spaces cannot be secured on the ceiling side
Solution Approach 1:
The rail system is divided into multiple independent rail lines (first rail line, second rail line, third rail line) that can operate independently. This segmentation allows vehicles to switch between different paths and prevents congestion by distributing traffic across multiple segments rather than a single predetermined path.
Solution Approach 2:
The system transitions from one-dimensional linear movement to two-dimensional grid-like movement by introducing multiple rail lines extending in different directions. Vehicles can move not only forward/backward but also switch between parallel rail lines, adding a lateral dimension to the movement space and enabling more flexible routing.
2Productivity
If storage spaces are not secured on the ceiling side, then the overhead space is fully utilized for transport, but articles cannot be efficiently stored during transfer operations
Solution Approach 1:
Storage shelves are pre-positioned at strategic locations along the rail lines, particularly at intersections and key transfer points. This preliminary placement of storage infrastructure allows articles to be immediately stored during transfer operations without requiring additional travel time or temporary holding areas, thus preventing productivity loss.
Solution Approach 2:
Storage shelves act as intermediary elements between the transport function and the storage function. They provide temporary holding capacity at critical points in the transport network, allowing articles to be staged, transferred, or stored without blocking the main transport flow, thus maintaining productivity while enabling efficient storage operations.
3Ease of operation
If a battery-powered transfer robot is used, then movement flexibility is improved, but continuous charging is required to maintain operation
Solution Approach 1:
The transfer robot automatically recharges its battery by approaching charging stations positioned along the rail lines during normal operations. This self-service charging mechanism eliminates the need for manual intervention or system shutdowns for recharging, allowing the robot to maintain continuous operation while flexibly moving between work locations and charging points as needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient article transfer and storage by optimizing paths to reduce congestion and utilize ceiling space effectively, with continuous charging of the transfer robot, enhancing overall conveyance efficiency and space utilization in semiconductor manufacturing plants.
Implementation Method 1
the battery of the transfer robot is configured to be charged by electromagnetic induction generated between the power receiving block and the plurality of power transmission rails
Data Source
AI summary
An article transfer and storage apparatus includes a travel rail that includes a plurality of first rails extending in a first direction and spaced apart from each other in a second direction perpendicular to the first direction and a plurality of second rails extending in the second direction and spaced apart from each other in the first direction, a plurality of power transmission rails disposed above the travel rail, extending in the first direction, and spaced apart from each other in the second direction, a transfer robot that is configured to move on the travel rail in the first direction and the second direction to convey an article, the transfer robot including a battery charged by power provided from the plurality of power transmission rails, and storage shelves disposed below the travel rail.


