Grid Rail Substrate Transfer with Lifted Wheel Switching
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Solution Overview
Problem
Semiconductor factories face challenges in maintaining cleanliness and minimizing particle generation during substrate transfer processes, which are critical for sensitive operations.
Innovation Solution
A substrate transfer apparatus and system utilizing a grid rail structure with a compact elevation device and shielding mechanisms to reduce particle generation, enabling efficient movement of carriers while maintaining cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If overhead hoist transport is used to transfer carriers, then substrate transfer capability is provided, but particle generation occurs and cleanliness deteriorates
Solution Approach 1:
The patent replaces the traditional overhead hoist transport mechanical system with a grid rail-based transport system. The grid rail structure provides a controlled environment that minimizes particle generation during substrate transfer, eliminating the harmful effects associated with conventional hoist operations while maintaining reliable carrier transfer capability
Solution Approach 2:
The grid rail transport system creates a controlled, clean environment for substrate transfer. The structured rail system minimizes air movement and particle disturbance, effectively creating a cleaner transfer environment that protects substrates from contamination while maintaining operational reliability
2Ease of operation
If elevation device with complex structure is used, then lifting capability is improved, but device complexity increases and space occupation grows
Solution Approach 1:
The elevation device is segmented into modular components including a lift mechanism with discrete elements that can be independently positioned and controlled. This segmentation allows the complex lifting function to be achieved through coordinated simple components, reducing overall device complexity while maintaining full lifting capability
Solution Approach 2:
The elevation device utilizes vertical dimension optimization by positioning components along the Z-axis to minimize horizontal space occupation. The lift mechanism is designed to operate primarily in the vertical direction, allowing the apparatus to achieve full lifting capability while occupying minimal footprint space in the X-Y plane
3Stability of the object's composition
If wheel assemblies are positioned at lower position for stability, then contact with rails is maintained, but elevation flexibility and directional changing capability are reduced
Solution Approach 1:
The wheel assembly position is made dynamic rather than fixed. The elevation device can adjust the vertical position of wheel assemblies along the grid rails, allowing the system to maintain stable contact when needed while also enabling elevation flexibility and directional changes. This dynamic positioning resolves the contradiction between stability and adaptability
Data Source
AI summary
A substrate transfer system includes a main body on which a carrier configured to store a substrate is loaded, a first wheel assembly disposed inside the main body and configured to travel along a first rail extending in a first direction, a second wheel assembly disposed inside the main body and configured to travel along a second rail extending in a second direction different from the first direction, and a lift disposed inside the main body and configured to move the first wheel assembly up and down between a first lower position at which the first wheel assembly is in contact with the first rail and a first upper position higher than the first lower position, and to move the second wheel assembly up and down between a second lower position at which the second wheel assembly is in contact with the second rail and a second upper position higher than the second lower position.