Assembled Grid Tray Frame for High-Capacity Wafer Handling
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Solution Overview
Problem
Fabricating larger semiconductor substrate trays for larger processing tools is costly and poses engineering challenges such as tray sagging during extreme heat conditions, while using multiple smaller trays introduces handling complexities.
Innovation Solution
An assembled grid tray system comprising a frame with outer and inner frame members, magnet rails, and outer beam members to hold multiple smaller trays, allowing for magnetic levitation or robotic conveyance, eliminating the need for larger trays and simplifying handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If larger trays are fabricated to hold more substrates, then the capacity for processing multiple substrates is improved, but the manufacturing cost and engineering complexity increase substantially
Solution Approach 1:
The patent divides a large tray capacity into multiple smaller individual trays that are held within a frame structure. Instead of fabricating one large complex tray, the system uses several smaller trays (each capable of holding multiple substrates) arranged in a grid pattern within a frame, thereby achieving high substrate capacity while avoiding the engineering challenges of building a single large tray.
2Quantity of substance
If larger trays are fabricated to hold more substrates, then the capacity for processing multiple substrates is improved, but the manufacturing cost increases substantially
Solution Approach 1:
The patent divides a large tray capacity into multiple smaller individual trays that are held within a frame structure. Instead of fabricating one large complex tray, the system uses several smaller trays (each capable of holding multiple substrates) arranged in a grid pattern within a frame, thereby achieving high substrate capacity while avoiding the engineering challenges of building a single large tray.
3Quantity of substance
If larger trays are used, then the substrate processing capacity is improved, but tray sagging occurs during extreme heat conditions
Solution Approach 1:
The patent divides a large tray capacity into multiple smaller individual trays that are held within a frame structure. Instead of fabricating one large complex tray, the system uses several smaller trays (each capable of holding multiple substrates) arranged in a grid pattern within a frame, thereby achieving high substrate capacity while avoiding the engineering challenges of building a single large tray.
Solution Approach 2:
The patent replaces mechanical support structures with a magnetic levitation system. Magnets embedded in the frame and trays create magnetic fields that levitate and support the trays without physical contact, eliminating mechanical stress and sagging that would occur under extreme heat conditions while maintaining structural stability.
4Ease of manufacture
If multiple smaller trays are used instead of one large tray, then the manufacturing cost and complexity are reduced, but handling complexities increase
Solution Approach 1:
The patent combines multiple smaller trays into a unified assembly held within a single frame structure. This allows the trays to be handled, transported, and processed as one integrated unit rather than individually, thereby maintaining ease of manufacture with smaller trays while eliminating handling complexities through collective management.
Solution Approach 2:
The patent replaces mechanical support structures with a magnetic levitation system. Magnets embedded in the frame and trays create magnetic fields that levitate and support the trays without physical contact, eliminating mechanical stress and sagging that would occur under extreme heat conditions while maintaining structural stability.
5Ease of manufacture
If multiple smaller trays are used instead of one large tray, then the manufacturing cost and complexity are reduced, but handling complexities increase
Solution Approach 1:
The patent combines multiple smaller trays into a unified assembly held within a single frame structure. This allows the trays to be handled, transported, and processed as one integrated unit rather than individually, thereby maintaining ease of manufacture with smaller trays while eliminating handling complexities through collective management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient processing of multiple substrates without the high costs and complexities of larger trays, by allowing handling of multiple smaller trays as a unit, reducing tray sagging and improving handling efficiencies.
Implementation Method 1
each with a magnet rail used with a maglev system
Data Source
AI summary
An assembled grid tray is disclosed, comprising a frame for holding multiple substrate trays to form a larger tray for use in a semiconductor processing tool. The frame may be comprised of two outer frame members that hold one or more of the trays, each with a magnet rail use with a maglev system. The frame may be further comprised of an inner frame member positioned between the outer frame members, which may also include a magnet rail, with the frame members being held in position by one or more outer beam members. The frame members may be fabricated of a material having a similar thermal expansion to trays to be placed in the frame.