Grinding Apparatus Cover Segmentation for Particle Containment
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Solution Overview
Problem
Existing grinding apparatuses face challenges in suppressing the outflow of particles and mist, which can contaminate the cleaning section and affect the cleanliness and quality of the substrates being processed.
Innovation Solution
The grinding apparatus incorporates a rotary table with multiple chucks, a rotational driving unit, a grinding position cover, a cleaning unit, and an attachment/detachment position cover to manage the substrate's position and cleaning process, ensuring that particles and mist are contained within the system, preventing them from flowing to the cleaning section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the grinding apparatus operates without covers, then the cleaning unit can access the chuck and substrate for cleaning, but particles and mist generated during grinding will flow into the cleaning section causing contamination
Solution Approach 1:
The apparatus is divided into two separate sections: a grinding section with a grinding position cover that contains particles and mist during grinding, and a cleaning section with an attachment/detachment position cover that provides access for cleaning. This segmentation allows each section to optimize its function without interfering with the other, preventing contamination while maintaining cleaning accessibility
Solution Approach 2:
The rotary table serves as an intermediary mechanism that transports the substrate between the grinding section and cleaning section. By rotating the substrate holder, it enables the substrate to move from the grinding position to the attachment/detachment position for cleaning, and vice versa, without direct exposure between the two sections
2Productivity
If the rotary table rotates quickly to improve productivity, then more substrates can be processed per unit time, but particles and mist may be dispersed more widely
Solution Approach 1:
The harmful particles and mist are extracted from the general environment by containing them within the grinding position cover during high-speed rotation. The cover acts as a containment structure that isolates the particles and mist generated during grinding, preventing their dispersion into the cleaning section even when the rotary table operates at high speeds
Solution Approach 2:
The rotational motion that could potentially disperse particles is converted into a beneficial mechanism by using the same rotation to transport substrates through sealed transfer paths. The centrifugal force generated by rotation is utilized to move substrates along the transfer opening while the covers prevent particle escape, turning a potential harm into an efficient transport mechanism
Data Source
AI summary
A grinding apparatus includes a rotary table, multiple chuck, a rotational driving unit, a grinding position cover, a cleaning unit and an attachment/detachment position cover. The horizontal rotary table is configured to be rotated around a vertical rotation center line. The multiple chucks are arranged at an equal distance therebetween around the rotation center line of the rotary table. The rotational driving unit moves the chuck between an attachment/detachment position and a grinding position. The grinding position cover covers the grinding position from above and from a side. The cleaning unit is configured to supply a cleaning liquid to the chuck or the substrate at the attachment/detachment position. The attachment/detachment position cover covers the attachment/detachment position from above and from a side. The attachment/detachment position cover is provided with a transfer opening for the substrate in a side surface thereof, and accommodates therein the chuck and the cleaning unit.