Substrate Grinding Disk Light Channels with Slurry-Blocking Plates
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Solution Overview
Problem
The accumulation of slurry-like substance and foam in the light channels of a substrate grinding apparatus affects the accuracy of thickness measurement due to obstruction and refraction of laser light, compromising the precision of the thickness measuring device.
Innovation Solution
The implementation of multiple mounting holes in the grinding disk with first and second light guides and light transmission plates that form light channels, blocking the entry of slurry and foam, ensuring uninterrupted thickness measurement during grinding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If light channels are provided for thickness measurement during grinding, then real-time thickness measurement is enabled, but slurry and foam enter the light channels causing measurement inaccuracies
Solution Approach 1:
A protective cover is introduced as an intermediary component that seals the light channel opening on the grinding disk surface. This cover prevents slurry and foam from entering the light channel while allowing laser light to pass through for thickness measurement, thus resolving the contradiction between enabling measurement and preventing contamination
Solution Approach 2:
The protective cover is designed as a thin, transparent structure that can be positioned over the light channel opening. This thin film approach allows optical transmission while providing effective protection against slurry and foam intrusion into the light channel
2Adaptability or versatility
If mounting holes are provided for light guides in the grinding disk, then thickness measurement functionality is integrated, but slurry accumulates in the holes and blocks light transmission
Solution Approach 1:
The protective cover acts as an intermediary barrier over the mounting holes, preventing slurry accumulation while maintaining the integrated measurement capability. The cover ensures reliable light transmission by keeping the light channel clear of contaminants
Solution Approach 2:
The protective cover is divided into multiple sections corresponding to different mounting holes and light channels. Each segment can independently protect its associated light channel, allowing the system to maintain functionality across multiple measurement points while preventing contamination in each individual channel
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the accuracy of substrate thickness measurement by preventing the interference of slurry and foam in the light channels, thereby improving the precision of the thickness measuring device.
Implementation Method 1
the foam can enter the light channels, causing refraction of the laser light or its reflected light
Implementation Method 2
The illuminator projects laser light through the light channel to irradiate the substrate being ground
Data Source
AI summary
Disclosed is a grinding configuration for a substrate grinding apparatus. The grinding configuration includes a grinding disk, multiple first light guides, and multiple second light guides. Multiple mounting holes are penetrated through the grinding disk, with each first light guide and each second light guide being provided in each mounting hole, respectively. Each first light guide and each second light guide is penetrated along its axial direction to form a light channel. Multiple light transmission plates are provided at the lower end of each first light guide and each second light guide, which block the communication between each light channel and the space below the grinding disk, thereby preventing slurry or foam generated during substrate grinding from entering each light channel.