Grinding Force Measurement with Stationary Load Cell Calibration
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Solution Overview
Problem
Existing force measurement systems in chemical mechanical polishing processes fail to accurately monitor the pressing force applied to a grinded object due to the removal of the grinding disk during measurement, leading to incomplete force detection and potential signal cable issues.
Innovation Solution
A force measurement system where a load cell is fixed on a force receiving device, allowing the grinding disk to be mounted on the grinding arm, enabling the detection of the sum of the pressing force of the grinding arm and the deadweight of the grinding disk, ensuring accurate force measurement during actual grinding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the grinding disk is removed during force measurement, then the load cell can detect the pressing force of the grinding arm, but the detection result does not include the deadweight of the grinding disk leading to incomplete force detection
Solution Approach 1:
The system performs preliminary calibration by measuring the deadweight of the grinding disk before actual force measurement. This preliminary action allows the system to later add this known value to the measured pressing force, achieving complete and accurate force detection that includes both the grinding arm's pressing force and the grinding disk's deadweight.
2Measurement precision
If the load cell is fixed on the grinding arm, then the pressing force can be detected, but the signal cable may be damaged due to movement and mechanical stress
Solution Approach 1:
The load cell is extracted from the moving grinding arm and relocated to the stationary force receiving device. This separation removes the signal cable from the moving parts, eliminating the risk of cable damage from movement and mechanical stress while preserving the force detection capability through the stationary measurement setup.
3Measurement precision
If the load cell is fixed on the force receiving device with the grinding disk mounted on the grinding arm, then the complete force including deadweight can be detected, but the system complexity increases
Solution Approach 1:
The force receiving device serves as an intermediary component between the grinding arm and the load cell. It receives the pressing force from the grinding arm and transmits it to the load cell, which is fixed on the stationary device. This intermediary structure enables complete force measurement without requiring the load cell to move with the grinding arm, thus avoiding cable damage while maintaining measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures precise and stable force measurement, avoiding signal cable damage and ensuring accurate detection of the forces applied to the grinded object, thereby improving the control and consistency of the grinding process.
Implementation Method 1
a load cell, which is fixed on the force receiving device and configured to detect the force received by the force receiving device
Data Source
AI summary
A force measurement system includes: a grinding arm and a force receiving device, the force receiving device being fixed on its one side and configured to receive a force from the grinding arm; a load cell, which is fixed on the force receiving device and configured to detect the force received by the force receiving device; and a grinding disk, which is fixed on the grinding arm that applies the force to the force receiving device through the grinding disk. The embodiments of the present application facilitate accurate acquisition of a force acting upon a grinded object during actual grinding.