Grinding Housing Sensor Cover for Accurate Liquid Level Detection

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The liquid level sensors in grinding apparatuses are prone to malfunction and breakdown due to contamination and exposure to grinding residues and liquids, which affects their accuracy and reliability.

Innovation Solution

Incorporating a sensor cover between the chuck and the liquid level sensor to block contaminants and reduce the impact of grinding residues and liquids, thereby protecting the sensor and preventing malfunctions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the liquid level sensor is disposed inside the housing to detect liquid level, then the measurement function is achieved, but the sensor is exposed to grinding residues and liquids causing contamination and malfunction

Engineering Contradiction:
Improveliquid level detection accuracyVSAvoidsensor operational reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

A sensor cover is introduced as an intermediary component between the grinding environment and the liquid level sensor. The cover allows the sensor to detect liquid levels through its structure while blocking grinding residues and excessive liquids from directly contacting the sensor, thus resolving the contradiction between measurement functionality and reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The sensor cover acts as a protective shell that encloses the sensor while allowing it to function. The cover structure provides physical protection against contaminants while maintaining the sensor's ability to detect liquid levels, effectively isolating the sensor from harmful environmental factors.

Inventive Principle:
Principle #30Flexible shells and thin films

2Measurement precision

If the sensor is exposed to the grinding environment for direct detection, then detection accuracy is maintained, but contamination from grinding residues causes malfunction

Engineering Contradiction:
Improveliquid level detection accuracyVSAvoidcontamination from grinding residues
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The sensor cover serves as a mediator that separates the sensor from harmful grinding residues. It allows the sensor to perform its detection function accurately while preventing direct contact with contaminants that would cause malfunction or degradation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The sensor cover creates a protected environment around the sensor, effectively copying or replicating a clean detection zone within the harsh grinding environment, allowing accurate measurement without direct exposure to harmful factors.

Inventive Principle:
Principle #26Copying

3Reliability

If the sensor is protected from contaminants, then reliability is improved, but detection accuracy may be compromised

Engineering Contradiction:
Improvesensor operational reliabilityVSAvoidliquid level detection accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The sensor cover is designed as a carefully balanced intermediary structure that provides protection while maintaining detection accuracy. It allows necessary liquid contact for level detection while blocking harmful contaminants, thus achieving both reliability and measurement precision simultaneously.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS20230364740A1Grinding apparatus
Publication Date: 2023.11.16 TOKYO ELECTRON LTD
  • US20230364740A1 patent drawing
  • US20230364740A1 patent drawing
  • US20230364740A1 patent drawing

AI summary

A grinding apparatus includes a chuck, a housing, a tool driving unit, a nozzle, a sensor and a sensor cover. The chuck is configured to hold a substrate. The housing accommodates the chuck therein. The tool driving unit is configured to drive a grinding tool pressed against the substrate within the housing. The nozzle is configured to supply a grinding liquid to the substrate within the housing. The sensor is disposed at an inside of the housing and is configured to detect a liquid level of a liquid collected within the housing. The sensor cover is located between the chuck and the sensor.