Gripper Hand Sensor System for Robotic Arm Collision Detection
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Solution Overview
Problem
Conventional inspection techniques for robotic arms in semiconductor assembly lines are inefficient and require significant overhead, often resulting in unsatisfactory results, as they rely heavily on manual processes and lack effective automated methods for quality control and maintenance.
Innovation Solution
Implementing a gripper hand sensor system on robotic arms that collects and analyzes sensor data to detect adverse conditions, such as imminent collisions or wafer malfunctions, allowing for automated adjustments or halting of the robotic arm routine to prevent damage and ensure proper operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual inspection techniques are used for robotic arm functionality, then inspection can be performed, but the robotic arm and assembly line must go offline, resulting in loss of time and reduced productivity
Solution Approach 1:
The sensor system performs continuous monitoring of robotic arm functionality before actual failures or performance degradation occur. By detecting adverse conditions early through sensors on the gripper hand, the system can take preliminary corrective actions while the assembly line remains operational, avoiding unplanned downtime and maintaining productivity.
Solution Approach 2:
The robotic arm system performs self-inspection through integrated sensors that continuously monitor its own functionality, position, and operational status. This self-monitoring capability eliminates the need for external manual inspection that would require taking the system offline, allowing continuous operation while maintaining reliability through automated detection of adverse conditions.
2Reliability
If manual inspection techniques are used for robotic arm functionality, then inspection can be performed, but large amounts of overhead and expensive hardware are required
Solution Approach 1:
The sensor system serves multiple functions simultaneously: it monitors robotic arm position, detects adverse conditions, prevents collisions, and tracks operational status. By integrating these diverse inspection and monitoring functions into a single sensor-based system on the gripper hand, the patent eliminates the need for separate inspection equipment and reduces overall system complexity and overhead.
Solution Approach 2:
The patent replaces manual mechanical inspection processes with electronic sensor-based detection. Sensors on the gripper hand electronically monitor robotic arm functionality and detect adverse conditions, substituting the need for physical manual inspection and reducing the overhead associated with mechanical inspection systems.
3Productivity
If no specific inspection techniques are used, then the system operates continuously, but collision detection and safety monitoring are insufficient
Solution Approach 1:
The sensor system continuously provides feedback about the robotic arm's operational status, position, and environmental conditions. This real-time feedback enables the control system to detect adverse conditions such as imminent collisions and adjust operations accordingly, maintaining both continuous productivity and high reliability through proactive safety monitoring.
Solution Approach 2:
The sensor system detects adverse conditions before they result in actual damage or safety incidents. By identifying potential collisions or malfunction indicators in advance, the system can take preliminary corrective actions to prevent harmful events, thereby maintaining continuous operation while ensuring high reliability through proactive protection.
Data Source
AI summary
In an embodiment, a robotic arm includes: a base; at least one link secured to the base; a gripper secured to the at least one link, wherein: the gripper comprises a finger, the gripper is configured to secure a wafer while the at least one link is in motion, and the gripper is configured to release the wafer while the at least one link is stopped, a sensor disposed on the finger, the sensor configured to collect sensor data characterizing the robotic arm's interaction with a semiconductor processing chamber while the wafer is secured using the finger.