Gripper Module Vibration Absorber for Substrate Transport

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Solution Overview

Problem

Existing substrate transport apparatuses experience vibrations and shocks during operation, which can damage semiconductor wafers stored in carriers due to inadequate vibration absorption, leading to transport failures and potential carrier separation.

Innovation Solution

A gripper module with a vibration absorber integrated into the gripper transporter, which blocks external shocks and vibrations from being transmitted to the gripper, using a combination of a base plate, driver, gripper transporter, and vibration absorber to absorb and dissipate these forces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the substrate transport apparatus operates at high speed along the traveling rail, then productivity is improved, but traveling vibrations are generated by rolling contact between the traveling wheel and rail that can damage substrates

Engineering Contradiction:

Improvetransport speedVSAvoidtraveling vibrations

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The vibration absorber acts as an intermediary element positioned between the gripper transporter and the carrier. It absorbs traveling vibrations generated during high-speed transport along the rail, preventing these vibrations from being transmitted to the carrier and substrates. This allows high-speed operation to continue while protecting the substrates from vibration damage.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The vibration absorber provides beforehand cushioning by being pre-installed in the gripper module before transport operations begin. It is positioned to intercept and absorb vibrations before they can reach the carrier, creating a protective buffer that enables high-speed transport without substrate damage.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

2Reliability

If the gripper module operates with high gripping force to securely hold the carrier, then reliability is improved, but shocks and vibrations during operation can still transmit to the carrier causing damage

Engineering Contradiction:

Improvegripping reliabilityVSAvoidshocks and vibrations

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The vibration absorber serves as a mediator between the gripper transporter and the carrier. Even when high gripping force is applied to ensure reliable carrier holding, the vibration absorber intercepts shocks and vibrations generated during gripping operations and carrier transport, preventing their transmission to the carrier and substrates.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The vibration absorber converts harmful shocks and vibrations into beneficial energy dissipation through controlled deformation. By allowing the vibration absorber to deform under shock loads, the harmful mechanical energy is transformed into material deformation energy, protecting the carrier while the gripper maintains strong gripping force.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Manufacturing precision

If the gripper module structure is made rigid to improve gripping precision, then manufacturing precision is improved, but vibrations are more readily transmitted to the carrier

Engineering Contradiction:

Improvegripping precisionVSAvoidvibration transmission

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The vibration absorber is introduced as a specialized intermediary component that decouples the rigid gripper structure from the carrier. The gripper module can maintain its rigid, precision-designed structure for accurate carrier positioning, while the vibration absorber positioned between the gripper transporter and carrier prevents vibration transmission to the carrier despite the rigidity of the gripper components.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents damage to substrates by absorbing and blocking vibrations and shocks, enhancing the operational stability of the substrate transport apparatus and preventing carrier separation during transport.

Implementation Method 1

a vibration absorber connected to the gripper transporter to block an external shock or an external vibration from being transmitted to the gripper

Methodology Applied

Scientific EffectVibration absorption: Damping

Data Source

PatentUS20240217118A1Gripper module including vibration absorber and substrate transport apparatus including a gripper module

Publication Date: 2024.07.04 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

The gripper module includes a base plate having a length in a first direction and a width in a second direction that is substantially perpendicular to the first direction; a driver disposed on a base plate to generate a driving power; a gripper transporter disposed on the base plate so as to be connected to the driver, and coupled to the driver and a gripper configured to grip a transport target carrier to linearly transport the gripper between a gripping position and a release position in the first direction; and a vibration absorber connected to the gripper transporter to block an external shock or an external vibration from being transmitted to the gripper.