Grooved Diamond Composite Bodies for Faster Electrochemical Separation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for separating diamond substrates and layers in chemical vapor synthesis are inefficient, leading to prolonged manufacturing times and increased costs due to slow permeation of etching solutions through thin non-diamond layers, especially as substrate size increases.
Innovation Solution
A diamond composite body with grooves in the substrate surface, allowing for faster permeation of etching solutions and electrochemical separation of the diamond layer from the substrate, utilizing a chemical vapor synthesis method to grow the diamond layer on a substrate with implanted ions and non-diamond layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If laser slicing is used to separate diamond substrate and layer, then separation can be achieved, but the process becomes less successful as substrate area increases due to required increased thickness
Solution Approach 1:
The patent introduces grooves that segment the substrate surface into multiple regions, allowing etching solution to access and penetrate the non-diamond layer at multiple locations simultaneously. This segmentation enables effective separation of large-area substrates without requiring increased thickness, directly resolving the contradiction between separation success rate and substrate area.
2Productivity
If ion implantation is performed to create non-diamond layer for separation, then electrochemical separation becomes possible, but separation time becomes excessively long for large substrates due to slow etching solution permeation
Solution Approach 1:
The grooves create a porous-like structure on the substrate surface that allows rapid permeation of etching solution into the non-diamond layer. This accelerates the electrochemical separation process by enabling efficient solution access throughout the substrate, directly addressing the contradiction between separation speed and separation time for large substrates.
3Manufacturing precision
If homoepitaxial growth is used to obtain large type IIa single crystal diamond, then crystal quality is improved, but substrate removal and reuse becomes problematic
Solution Approach 1:
The patent performs preliminary action by forming grooves and a non-diamond layer on the substrate before epitaxial growth. This preliminary structure enables easy separation after growth, allowing substrate removal and reuse without compromising the high crystal quality achieved through homoepitaxial growth, thus resolving the contradiction between crystal quality and ease of manufacture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly reduces separation time and manufacturing costs by enhancing the permeation of etching solutions through grooves, enabling faster and more efficient separation of diamond layers from substrates.
Implementation Method 1
a chemical vapor synthesis method (hereinafter also referred to a Chemical Vapor Deposition (CVD) method) has been established as a method for synthesizing a diamond
Implementation Method 2
implanting ions from a growth surface with energy high enough to hardly deteriorate the crystallinity of an outermost surface to form an ion implantation layer directly on the diamond substrate
Implementation Method 3
thereafter etching the implantation layer by an electrochemical technique
Data Source
AI summary
Provided are a diamond composite body capable of shortening a separation time for separating a substrate and a diamond layer, the substrate, and a method for manufacturing a diamond, as well as a diamond obtained from the diamond composite body and a tool including the diamond. The diamond composite body includes a substrate including a diamond seed crystal and having grooves in a main surface, a diamond layer formed on the main surface of the substrate, and a non-diamond layer formed on a substrate side at a constant depth from an interface between the substrate and the diamond layer.