Grooved Support Column Grid for Cleaner FIB Sample Imaging
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Solution Overview
Problem
The use of existing grid structures for carrying samples in FIB processing leads to contamination of the sample due to secondary ions sputtered from the grid structure, resulting in a poor imaging effect in transmission electron microscopy.
Innovation Solution
A grid structure with a support column featuring a top surface and a groove that reduces the contact area with the sample and diverts secondary ions, enhancing sample stability and reducing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a conventional grid structure (copper mesh carbon film support or metal column grid) is used to carry the sample, then the sample can be supported and processed, but secondary ions are sputtered from the grid structure onto the sample, causing contamination and poor imaging effect
Solution Approach 1:
The patent extracts and removes the harmful part (secondary ions) by introducing a groove structure that diverts and channels the secondary ions away from the sample surface, preventing them from contaminating the sample while maintaining the support function of the grid structure
Solution Approach 2:
The groove is strategically positioned at specific locations on the support column (e.g., at the junction between support column and carrier, or at specific heights) to locally address the contamination problem where secondary ions are most problematic, without affecting the overall sample support functionality
2Stability of the object's composition
If the support column has a large contact area with the sample, then the sample is stable, but secondary ions are sputtered onto the sample, causing contamination
Solution Approach 1:
The support column surface is segmented by introducing a groove that divides the surface into different regions, creating a functional separation between the sample support area and the secondary ion diversion area, allowing both stability and contamination prevention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed grid structure improves the imaging effect of transmission electron microscopes by stabilizing the sample and minimizing contamination from secondary ions, thereby enhancing the quality and purity of the sample.
Implementation Method 1
A strong current ion beam can be used to strip surface atoms from the sample, to achieve micro-level and nano-level surface morphology processing
Implementation Method 2
FIB can be further paired with a chemical gas reaction in a physical sputtering manner, to selectively strip a metal, silicon oxide, or deposited metal layer from the sample
Data Source
AI summary
Embodiments of the present disclosure provide a grid structure. The grid structure includes a carrier and a support column; wherein the support column is located on the carrier, the support column has a top surface for supporting a sample; and the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface.