Grooved Rotating Light Source for Concave Liquid Plasma Formation
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Solution Overview
Problem
Current EUV light source apparatuses face challenges in achieving high luminous efficiency due to the spatial expansion of vaporized raw materials and low plasma density, which affects the intensity of the radiation generated.
Innovation Solution
A light source apparatus with a rotation body featuring a groove that overlaps with the incident area of the energy beam, where the liquid raw material is supplied and its layer thickness is adjusted to form a concave surface, regulating the expansion of the raw material when vaporized, thereby improving the luminous efficiency of the plasma generated.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If liquid raw material is supplied to the rotation body without layer thickness adjustment, then the structure is simpler, but the luminous efficiency decreases due to spatial expansion of vaporized material
Solution Approach 1:
The groove is pre-formed on the rotation body surface before the liquid raw material is supplied. This preliminary structural preparation guides the liquid material into a controlled layer that forms a concave surface upon vaporization, preventing spatial expansion of vaporized material and improving luminous efficiency without adding complex control mechanisms during operation.
Solution Approach 2:
The groove creates a concave curved surface on the liquid raw material layer. This curvature concentrates the vaporized material in a confined space rather than allowing it to expand spatially, thereby improving the luminous efficiency of plasma generation. The curved geometry naturally confines the vapor cloud without requiring additional mechanical constraints.
2Productivity
If the liquid raw material layer is not adjusted to form a concave surface, then the apparatus operation is simpler, but the plasma generation efficiency is lower
Solution Approach 1:
The groove structure is pre-formed on the rotation body, establishing the concave surface geometry before operation begins. This eliminates the need for real-time adjustment mechanisms during plasma generation, maintaining operational simplicity while ensuring high plasma generation efficiency through controlled material confinement.
Solution Approach 2:
The groove acts as an intermediary structure between the liquid raw material supply and the plasma generation process. It automatically shapes the liquid material into a concave form that optimizes vaporization and plasma generation, serving as a passive mediator that improves efficiency without requiring active control or complex operation.
3Loss of energy
If the groove structure is added to the rotation body, then the luminous efficiency is improved, but the manufacturing complexity increases
Solution Approach 1:
The groove introduces a controlled curvature to the rotation body surface, which is relatively simple to manufacture using conventional machining or molding techniques. This curved groove structure effectively confines vaporized material and improves luminous efficiency without requiring complex multi-component assemblies or advanced manufacturing processes.
Solution Approach 2:
The groove divides the rotation body surface into functional zones: the grooved area for plasma generation and the surrounding areas for material supply and structural support. This segmentation allows the complex function of luminous efficiency enhancement to be isolated to a simple geometric feature, easing overall manufacturing while achieving the desired performance improvement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively enhances the luminous efficiency of the plasma by controlling the expansion direction of the vaporized raw material, leading to improved radiation intensity and stability in EUV light generation.
Implementation Method 1
the liquid raw material is supplied and the layer thickness is adjusted to form a concave surface
Implementation Method 2
an energy beam transforms a liquid raw material into plasma to extract radiation
Implementation Method 3
EUV light source apparatuses generally include DPP (Discharge Produced Plasma) light source apparatuses, LDP (Laser Assisted Discharge Produced Plasma) light source apparatuses, and LPP (Laser Produced Plasma) light source apparatuses
Implementation Method 4
the layer thickness is adjusted such that a front surface of the liquid raw material forms a concave surface in response to the groove in the incident area of the energy beam
Implementation Method 5
regulating the direction of expansion of the vaporized raw material and improving plasma generation efficiency
Data Source
AI summary
A light source apparatus, in which an energy beam transforms a liquid raw material into plasma to extract radiation, includes a rotation body, a raw material supply section, and a layer thickness adjustment section. The rotation body is disposed at a position onto which the energy beam is incident, and includes a groove overlapping with an incident area of the energy beam. The raw material supply section supplies the groove with the liquid raw material. The layer thickness adjustment section adjusts a layer thickness of the liquid raw material such that a front surface of the liquid raw material forms a concave surface in response to the groove in the incident area of the energy beam.