Grooved Liquid Supply Port for Inkjet Head Etching
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Solution Overview
Problem
The existing methods for forming ink supply ports in ink jet recording heads using dry etching, such as the Bosch process, result in a ring-shaped scallop pattern that hinders the flow of removal liquid, leading to fluctuations in stop layer removal and reduced reliability, especially when the opening size is small or higher surface tension liquids are used.
Innovation Solution
A manufacturing method for a liquid ejection head that includes forming a groove shape on the wall surface of the liquid supply port extending from the rear surface to the front surface, using an etch-resistant mask with a thinner region around the opening, allowing for efficient liquid flow and removal of the stop layer during dry etching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If dry etching using the Bosch process is used to form ink supply ports, then the opening width can be suppressed and perpendicular shape can be achieved, but a ring-shaped scallop pattern is formed on the side wall which hinders liquid flow
Solution Approach 1:
The groove shape is formed in advance during the etching process by controlling the etching conditions and mask design, so that the liquid flow path is prepared beforehand without requiring additional processing steps after etching
Solution Approach 2:
The groove shape is specifically formed only in the liquid supply port region where liquid flow is required, while maintaining the perpendicular wall shape in other regions, thus locally improving liquid flow without compromising the overall structural precision
2Productivity
If the etching rate is increased to improve productivity, then the groove portion engraved amount increases and scallop pattern width increases, but meniscus formation becomes more likely which hinders removal liquid flow
Solution Approach 1:
The groove shape parameters (depth, width, orientation) are specifically optimized to work effectively even when formed at higher etching rates, allowing the process to maintain both high productivity and reliable liquid flow by adjusting the geometric parameters rather than reducing the etching rate
3Manufacturing precision
If the opening size of the ink supply port is reduced to improve precision, then manufacturing precision improves, but meniscus formation becomes more likely which prevents removal liquid from reaching the stop layer
Solution Approach 1:
The solution transitions from relying solely on the opening size (two-dimensional parameter) to incorporating the groove shape (three-dimensional feature) as the primary mechanism for guiding liquid flow, allowing small openings to maintain reliable liquid flow through the added dimensional complexity of the groove structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The groove shape in the liquid supply port enables stable liquid flow and efficient removal of the stop layer, enhancing the reliability and usability of the liquid ejection head by preventing meniscus formation and ensuring consistent liquid supply.
Implementation Method 1
As an etchant, a reactive etching gas creates fluorine radicals and charged particles from SF6, and forms volatile SiFX. Those radicals etch the substrate chemically or physically
Implementation Method 2
A (CF2)n-based coating film is formed on the surface by, as the fluorine-based material, a fluorocarbon gas
Implementation Method 3
The etching gas and the fluorine-based material are replaced, and generated ions are caused to move to an engraved bottom surface. The coating film at the bottom surface is broken by the ions
Implementation Method 4
the groove shape extending from a rear surface toward a front surface... enables stable liquid flow
Data Source
AI summary
Provided is a liquid ejection head including a substrate including a liquid supply port and an energy generating element, in which the liquid supply port has at least one groove shape formed in a wall surface thereof, the at least one groove shape extending from a rear surface, which is a surface opposite to a front surface on which the energy generating element is formed, toward the front surface.