Grooved Mask Sheet Structure to Suppress Tension-Induced Waves
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Solution Overview
Problem
The thinness of the mask sheet and the tensile force applied during its fixation to the mask frame can cause waves on the surface of the mask sheet, leading to potential deformation and deterioration of deposition quality.
Innovation Solution
The mask sheet is designed with a first zone containing a plurality of holes, a second zone with an edge of the mask sheet, and a third zone fixed to the mask frame. Additionally, the mask sheet includes a plurality of grooves arranged in the second zone, which extend in the direction of the short side of the mask sheet, helping to mitigate the tensile force-induced waves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Weight of moving object
If the mask sheet is made thin to reduce weight and improve flexibility, then the mask sheet can be easily fixed to the mask frame, but waves appear on the surface due to tensile force
Solution Approach 1:
The patent uses a thin mask sheet (10-50 μm) that is flexible enough to be easily fixed to the mask frame while maintaining sufficient mechanical strength. The thin film structure allows the mask sheet to conform to the mask frame during fixation but introduces surface waves when tensile force is applied, creating the technical contradiction that needs to be resolved through additional structural features like grooves or reinforcement patterns.
2Stability of the object's composition
If tensile force is applied to fix the mask sheet in a flat state, then the mask sheet adheres well to the mask frame, but waves appear on the surface of the mask sheet
Solution Approach 1:
The mask sheet is divided into multiple zones with different functions: a first zone with holes for material deposition, a second zone for structural support, and a third zone for fixation to the mask frame. This segmentation allows each zone to be optimized independently - the third zone can withstand tensile force for secure fixation while the first zone maintains surface flatness for quality deposition.
Solution Approach 2:
Different regions of the mask sheet are given different properties: the first zone has holes arranged in specific patterns for deposition, the second zone provides structural reinforcement, and the third zone is designed for fixation. This local differentiation allows the mask sheet to achieve both flatness in the deposition area and secure attachment to the frame simultaneously.
3Manufacturing precision
If the mask sheet is made thin to improve precision of deposition patterns, then the mask sheet can be more accurately positioned, but the mask sheet becomes more susceptible to deformation under tensile force
Solution Approach 1:
The mask sheet is constructed as a composite structure combining a thin base material (10-50 μm) with additional structural features such as grooves, reinforcement patterns, or multi-layer construction. This composite approach maintains the thinness required for precise deposition patterns while incorporating elements that provide the necessary mechanical strength to resist deformation under tensile force during fixation.
Data Source
AI summary
A mask sheet fixed to a mask frame includes a first zone in which a plurality of holes are arranged, a second zone outside the first zone and including an edge of the mask sheet, a third zone between the first zone and the second zone and fixed to the mask frame, and a plurality of grooves arranged in the second zone.