Grooved Flexible Pressure Sensor Structure to Prevent Cavity Collapse
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Solution Overview
Problem
Existing pressure sensors face challenges in achieving flexibility, sensitivity, and reliability, particularly in applications requiring durable and sensitive pressure detection across a wide range, while minimizing the risk of cavity collapse.
Innovation Solution
A pressure sensor design featuring a flexible film layer with grooves and electrodes, insulated by layers, and a cavity defined by these grooves, along with through holes and convex structures, enhances flexibility and sensitivity, reducing the risk of collapse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a traditional rigid pressure sensor structure is used, then structural strength is improved, but flexibility deteriorates
Solution Approach 1:
The patent employs flexible film layers as the substrate and encapsulation structure, replacing traditional rigid substrates. These flexible films provide both mechanical strength and flexibility, enabling the sensor to bend and deform while maintaining structural integrity. The flexible film substrate allows the sensor to be integrated into flexible devices while preserving the capacitance sensing function.
Solution Approach 2:
The patent divides the pressure sensor into distinct functional regions: a sensing region with electrodes and a non-sensing region with connection leads. The flexible film structure is segmented to accommodate these different functional requirements, with the sensing region allowing deformation for pressure detection while the non-sensing region maintains electrical connectivity.
2Measurement precision
If the cavity structure is made larger to improve pressure measurement range, then measurement precision is improved, but the risk of cavity collapse increases
Solution Approach 1:
The flexible film encapsulation layer provides a lightweight yet supportive structure that prevents cavity collapse while allowing the cavity to maintain its volume for pressure measurement. The flexibility of the film substrate enables the cavity to deform under pressure for measurement while the film itself prevents complete collapse.
Solution Approach 2:
The flexible film layers are positioned to provide preemptive support to the cavity structure, preventing collapse before it occurs. The film's mechanical properties are designed to cushion and support the cavity during pressure application, ensuring the cavity maintains its structural integrity while still allowing for accurate pressure measurement.
3Measurement precision
If electrode structures are added within grooves to enhance sensitivity, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The electrode structures are segmented and positioned within specific groove regions of the flexible film. This segmentation allows the electrodes to be integrated into the flexible film structure without requiring separate complex mounting mechanisms. The grooves provide pre-formed pathways that simplify electrode placement while maintaining sensitivity.
Solution Approach 2:
The electrode structures are merged with the flexible film groove features, combining the mechanical support function of the grooves with the electrical sensing function of the electrodes. This integration reduces the need for separate structural and electrical components, thereby reducing overall device complexity while maintaining sensitivity.
4Reliability
If multiple insulative layers are added to improve electrical isolation, then reliability is improved, but device complexity increases
Solution Approach 1:
The insulative layers are implemented as thin flexible film layers that provide electrical isolation while maintaining the overall flexibility of the device. These thin films are integrated into the layered structure of the flexible substrate, providing necessary electrical isolation without adding significant complexity or rigidity to the device.
Data Source
AI summary
Provided is a pressure sensor. The pressure sensor has a sensing region and a non-sensing region, and includes: a first flexible film layer, wherein a first groove is disposed in a first surface of the first flexible film layer, and the first groove is within the sensing region; a first electrode layer; a first insulative layer, disposed on a side, distal from the first flexible film layer, of the first electrode layer; a second electrode layer, wherein the second electrode layer is disposed on a side, distal from the first flexible film layer, of the first insulative layer; and a second flexible film layer, wherein the second flexible film layer is disposed on a side, distal from the first flexible film layer, of the second electrode layer.