Ground Strap Bar Assembly for CVD Chamber Grounding
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Solution Overview
Problem
The existing chemical vapor deposition systems face difficulties in efficiently and quickly connecting multiple ground straps to the chamber and susceptor, making the process time-consuming and complex.
Innovation Solution
The system incorporates a configuration with first and second ground strap bars and blocks, allowing the ground straps to be connected externally and then easily attached to the chamber and susceptor, reducing the complexity and time required for the process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple ground straps are connected directly to the chamber and susceptor individually, then reliable electrical connection is achieved, but the attachment process becomes time-consuming and complex
Solution Approach 1:
The patent combines multiple ground strap connections into a single integrated ground strap bar assembly. The ground strap bar includes multiple connection points that can be attached as one unit to the chamber and susceptor, thereby maintaining reliable electrical connections while significantly reducing the time and complexity of the attachment process compared to connecting each ground strap individually.
Solution Approach 2:
The ground strap bar is segmented into multiple connection points or sections, each capable of connecting to different components. This segmentation allows the single bar to serve multiple grounding functions simultaneously, enabling reliable electrical connection across multiple points while being installed as one piece rather than multiple separate straps.
2Reliability
If multiple ground straps are connected directly to the chamber and susceptor individually, then comprehensive grounding coverage is achieved, but the structural complexity increases
Solution Approach 1:
The patent merges multiple ground straps into a single ground strap bar structure that provides comprehensive grounding coverage. This integrated bar contains multiple connection points that can be attached to various locations on the chamber and susceptor, achieving the same grounding coverage as multiple separate straps but with reduced structural complexity and fewer attachment operations.
3Ease of operation
If ground straps are connected externally before installation, then the attachment process is simplified, but precise positioning becomes more difficult
Solution Approach 1:
The ground strap bar is prepared in advance with pre-positioned connection points and attachment features before installation into the chamber. This preliminary configuration allows the entire grounding assembly to be installed as one unit, simplifying the attachment process while maintaining precise positioning through the pre-designed geometry and mounting features of the bar structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the attachment process, reduces time, and ensures efficient transmission of high-frequency power within the system, minimizing the risk of arc discharge.
Implementation Method 1
a plurality of ground straps electrically connected to the first ground strap bar and the second ground strap bar
Data Source
AI summary
A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.