Grounded Bernoulli Chuck for Static-Free Workpiece Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The Bernoulli chuck used in workpiece processing becomes electrically charged due to friction, attracting foreign matter and causing contamination, and the workpiece also becomes charged, leading to patterning and focal shifts.
Innovation Solution
A workpiece processing apparatus with a Bernoulli chuck made of conductive material grounded, using ionized gas or carbonated water to neutralize static electricity, and rollers made of conductive materials to ground the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a Bernoulli chuck is used to support the workpiece in a non-contact manner, then the workpiece can be supported without contamination from contact, but the Bernoulli chuck becomes electrically charged due to friction with the fluid, attracting foreign matter and causing contamination
Solution Approach 1:
An ionizer is introduced as an intermediary device between the fluid supply and the Bernoulli chuck. The ionizer treats the fluid (gas or liquid) by adding ions before it reaches the Bernoulli chuck, enabling the charged fluid to neutralize static electricity on the chuck surface while maintaining the non-contact support function
Solution Approach 2:
The patent replaces the conventional Bernoulli chuck using only mechanical fluid dynamics with a modified system that incorporates electrical field effects through ionized fluid. This substitution allows the system to simultaneously achieve non-contact support and static electricity removal by utilizing the electrical properties of ionized fluid
2Stability of the object's composition
If the Bernoulli chuck emits fluid to generate suction force, then the workpiece can be held stably, but the workpiece becomes electrically charged due to friction with the fluid, causing the same contamination problem
Solution Approach 1:
The ionizer serves as a mediator that treats the fluid before it contacts the workpiece. By ionizing the fluid upstream, the system enables the fluid to neutralize static electricity on the workpiece surface during the stable holding process, converting a harmful effect into a beneficial one
Solution Approach 2:
The patent converts the harmful friction-induced static electricity generation into a beneficial effect by introducing an ionizer. The same fluid that causes charging through friction now carries ions that neutralize the charge, transforming the problem into a solution where the friction effect serves dual purposes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes static electricity from the Bernoulli chuck and workpiece, preventing contamination and ensuring accurate processing by maintaining the workpiece's surface charge neutrality.
Implementation Method 1
The Bernoulli chuck is configured to generate a suction force by emitting fluid using Bernoulli's theorem, and support the workpiece in a non-contact manner via the fluid
Implementation Method 2
an ionizer configured to ionize the gas flowing through the fluid supply line
Implementation Method 3
at least part of the Bernoulli chuck is made of a conductive material and is grounded
Implementation Method 4
at least part of the Bernoulli chuck is made of a conductive material and is grounded
Implementation Method 5
the Bernoulli chuck 112 is electrically charged due to friction between the fluid and the Bernoulli chuck 112
Data Source
AI summary
The present invention relates to a workpiece processing apparatus and a workpiece processing method for processing a workpiece, such as a wafer, a substrate, or a panel. The workpiece processing apparatus (1) includes: a workpiece supporting device (10) configured to support the workpiece (W); and a processing head (20) configured to process the surface of the workpiece (W). The workpiece supporting device (10) has a fluid supply line (15) for passing fluid therethrough, and a Bernoulli chuck (12) coupled to the fluid supply line (15), the Bernoulli chuck (12) is configured to attract the surface of the workpiece (W) by emitting the fluid, and at least part of the Bernoulli chuck (12) is made of a conductive material and is grounded.