Guard Ring ESD Protection with Contact-Free Weak Spot

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Solution Overview

Problem

The existing electrostatic protection circuits in semiconductor integrated circuits face challenges in reducing the risk of destruction at weak spots in the PN junctions between protection devices and guard ring regions, particularly due to high current density and impedance issues during surge discharge, which can lead to device destruction and increased chip area requirements.

Innovation Solution

The solution involves forming a semiconductor integrated circuit with a guard ring structure around the protection device, where the guard ring has a ring-like planar shape and lacks electrical contacts on the side facing the weak spot, thereby increasing series resistance and reducing the risk of destruction. This design maintains ESD endurance while minimizing device area by optimizing the distance between impurity regions and the guard ring.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If electrical contacts are formed in the guard ring facing the weak spot, then the ESD protection capability is improved, but the current density at the weak spot increases causing device destruction

Engineering Contradiction:
ImproveESD protection capabilityVSAvoidcurrent density at weak spot
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent extracts removes the electrical contacts from the guard ring portion facing the weak spot (PN junction between protection device and guard ring). This extraction eliminates the direct current path through the guard ring at the vulnerable location, preventing high current density from concentrating at the weak spot during ESD events, while maintaining ESD protection capability through alternative current paths.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different structural qualities to different portions of the guard ring. The guard ring has electrical contacts in most portions to provide ESD protection, but deliberately lacks contacts in the specific portion facing the weak spot. This local differentiation allows the structure to provide protection where needed while avoiding harm where vulnerable.

Inventive Principle:
Principle #3Local quality

2Area of stationary object

If the guard ring is positioned closer to the protection device, then the device area is reduced, but the impedance decreases increasing the risk of destruction

Engineering Contradiction:
Improvedevice areaVSAvoidrisk of destruction at weak spot
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent optimizes the positional parameter of the guard ring relative to the protection device. By carefully controlling the distance and arrangement between the guard ring and the protection device, the design achieves compact area while maintaining sufficient impedance to prevent destruction at weak spots during surge discharge events.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the guard ring is positioned farther from the protection device, then the impedance increases reducing destruction risk, but the device area increases

Engineering Contradiction:
Improverisk of destruction at weak spotVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent optimizes the positional parameter of the guard ring relative to the protection device. By carefully controlling the distance and arrangement between the guard ring and the protection device, the design achieves compact area while maintaining sufficient impedance to prevent destruction at weak spots during surge discharge events.

Inventive Principle:
Principle #35Parameter changes

4Reliability

If multiple electrical contacts are formed in the guard ring, then the ESD current distribution is improved, but the current density at weak spots increases causing device destruction

Engineering Contradiction:
ImproveESD current distributionVSAvoidcurrent density at weak spot
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent extracts removes the electrical contacts from the guard ring portion facing the weak spot (PN junction between protection device and guard ring). This extraction eliminates the direct current path through the guard ring at the vulnerable location, preventing high current density from concentrating at the weak spot during ESD events, while maintaining ESD protection capability through alternative current paths.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different structural qualities to different portions of the guard ring. The guard ring has electrical contacts in most portions to provide ESD protection, but deliberately lacks contacts in the specific portion facing the weak spot. This local differentiation allows the structure to provide protection where needed while avoiding harm where vulnerable.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces the risk of destruction at weak spots in the PN junctions, maintains ESD endurance, and minimizes the device area, addressing the challenges of high current density and impedance while ensuring reliable surge discharge handling.

Implementation Method 1

lacks electrical contacts on the side facing the weak spot, thereby increasing series resistance and reducing the risk of destruction

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Data Source

PatentUS10411095B2Semiconductor integrated circuit with guard ring
Publication Date: 2019.09.10 RENESAS ELECTRONICS CORP
  • US10411095B2 patent drawing
  • US10411095B2 patent drawing
  • US10411095B2 patent drawing

AI summary

A semiconductor integrated circuit includes a first conduction-type semiconductor region, a second conduction-type first impurity region, and a guard ring formed using a first conduction-type second impurity region so as to form a protection device of an electrostatic protection circuit. The first impurity region is formed inside the semiconductor region to have a rectangular planar structure with long and short sides. The guard ring is formed inside the semiconductor region to surround the periphery of the first impurity region. A weak spot is formed on the short side of the rectangular planar structure of the first impurity region. A plurality of electrical contacts are formed in a first portion of the guard ring which faces the long side of the rectangle. A plurality of electrical contracts are not formed in a second portion of the guard ring which faces the weak spot formed on the short side of the rectangle.