Guide Apparatus Plate Members Particle Containment
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Solution Overview
Problem
Existing guide apparatuses in exposure systems for semiconductor manufacturing generate particles during movement, which scatter and cause pattern defects and yield degradation due to insufficient particle containment, despite attempts to prevent scatter with covers.
Innovation Solution
The guide apparatus incorporates a cover unit with multiple plate members extending from the moving member, positioned to trap particles generated between the guide and moving members, using a configuration of first and second cover units that surround the moving member to prevent particle scatter by creating gaps and using spacers to maintain intervals, effectively capturing and attenuating particle kinetic energy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a cover is attached to the moving-direction end of the moving member to prevent particle scatter, then particle containment is improved, but particles continue to fly inside the cover and scatter from gaps between the cover and guide member or base
Solution Approach 1:
The cover is divided into multiple plate members arranged in parallel with gaps between them. This segmentation allows particles to be trapped through repeated reflections between the plates and the base, while still containing the particles within the overall cover structure. The gaps prevent a single large reflective surface while maintaining effective particle trapping through multiple smaller reflective surfaces.
Solution Approach 2:
The solution transitions from a single-dimensional cover (simple end cap) to a multi-dimensional structure with plate members extending in multiple directions. The plate members are arranged to create a three-dimensional trapping zone where particles can be reflected in multiple directions (between plates and between plates and base), effectively containing particles that would otherwise escape through gaps.
2Device complexity
If the cover is simply attached to the moving-direction end of the moving member, then device complexity is reduced, but particle scatter prevention is insufficient due to gaps between cover and guide member or base
Solution Approach 1:
Instead of a single complex sealed cover, the structure uses multiple simple plate members arranged in parallel. Each plate is a simple component, but their collective arrangement creates an effective particle trapping system. This segmentation maintains relative structural simplicity while significantly improving particle containment through the cumulative effect of multiple reflective surfaces.
Solution Approach 2:
The plate members act as intermediary elements between the moving member and the external environment. Rather than using a direct sealed cover, the plates create an intermediate zone where particles are trapped and reflected, mediating between the particle-generating moving member and the external space where particles would cause damage.
Data Source
AI summary
The present invention provides a guide apparatus including a guide member located on a base, and a moving member movable along the guide member. The guide apparatus comprising a plurality of plate members each including a portion facing the base and extending from the portion in a direction to separate from the base, wherein the plurality of plate members are located apart from each other in a direction to separate from the moving member.