Guide Cup Gas Flow Management for Substrate Liquid Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate liquid processing, scattered process-liquid can adhere back to the substrate due to air currents, leading to inefficiencies and particle generation in existing systems.
Innovation Solution
A substrate liquid processing apparatus with a guide rotary cup and guide cups that rotate with the substrate, featuring downward extensions and inner peripheral extensions to create a gas guide space, preventing process-liquid from adhering back to the substrate by guiding it downward and managing air currents.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If a scattering prevention cup with a very large opening is used to guide cleaning liquid, then the cleaning liquid can be guided to the recovery path, but the cleaning liquid with mist adheres to the substrate again due to outward air current
Solution Approach 1:
The scattering prevention cup is divided into multiple functional sections: an upper section with a large opening for liquid guidance, and a lower section with a smaller opening surrounded by a shield. This segmentation allows the upper part to recover liquid while the lower shield prevents mist from adhering to the substrate.
Solution Approach 2:
A shield structure is introduced as an intermediary element between the scattering prevention cup and the substrate. This shield blocks the outward air current and prevents mist-laden cleaning liquid from reaching the substrate surface, thereby maintaining substrate cleanliness while preserving liquid recovery efficiency.
2Ease of operation
If the scattering prevention cup has a very large opening, then liquid guidance is improved, but mist floats upward and adheres to the substrate due to air current
Solution Approach 1:
The cup structure is segmented vertically with different opening sizes at different heights. The upper portion has a large opening for effective liquid guidance, while the lower portion has a reduced opening protected by a shield, eliminating mist adhesion without compromising liquid guidance.
Solution Approach 2:
The solution adds a spatial dimension by introducing a shield structure that creates a protected zone around the lower opening. This three-dimensional arrangement separates the liquid guidance function (upper opening) from the mist prevention function (lower shielded opening).
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents process-liquid from adhering to the substrate again, reducing particle generation and improving recovery rates of process-liquids into designated recovery tanks.
Implementation Method 1
the guide rotary cup being configured to rotate together with the substrate holding table to guide the process-liquid scattering from the rotating substrate
Implementation Method 2
an inner peripheral extension portion extending inward from the inner peripheral end portion more than the downward extension portion, the inner peripheral extension portion being configured to form a gas guide space together with the guide rotary cup and the downward extension portion so that a gas turning by the rotation of the guide rotary cup is guided downward
Data Source
AI summary
A substrate liquid processing apparatus of the present invention includes a guide rotary cup configured to guide a process-liquid scattering from a substrate rotating and being held by a substrate holding table and a guide cup configured to guide downward the process-liquid guided by the guide rotary cup. The guide cup includes a downward extension portion extending downward from an inner peripheral end portion of a guide cup body and an inner peripheral extension portion extending inward from the inner peripheral end portion more than the downward extension portion. The inner peripheral extension portion is configured to form a gas guide space together with the guide rotary cup and the downward extension portion so that a gas turning by the rotation of the guide rotary cup can be guided downward.