Guide Pin Double Slide Structure for Photo Mask Cleaning

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Solution Overview

Problem

During the cleaning process of photo masks, the surface-to-surface contact between the photo mask and supporting pins can lead to scratches, as existing supporting pins do not effectively prevent movement or eccentricity, causing unwanted pattern transfer due to foreign material residue.

Innovation Solution

A photo mask supporting unit with guide pins featuring a double slide structure, where each guide pin has a first and second sliding portion inclined at different angles, supporting the corners or flat surfaces of the photo mask to prevent scratches and ensure stable positioning during rotation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the photo mask is supported on conventional supporting pins during cleaning, then the photo mask can be held in place for cleaning, but scratches occur on the photo mask surface due to surface-to-surface contact

Engineering Contradiction:
Improvecleaning effectivenessVSAvoidsurface scratches
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The guide pin applies local quality by creating a localized line contact region instead of surface contact. The inclined sliding portions concentrate the contact area to a thin line along the inclination, reducing the contact area and preventing scratches while maintaining adequate support for cleaning operations.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The inclined sliding portion acts as an intermediary between the photo mask and the guide pin body. This intermediate inclined surface transforms the contact from direct surface-to-surface contact to line contact through the sliding interface, reducing friction and preventing damage during the cleaning process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If conventional supporting pins are used, then the structure is simple, but the photo mask experiences movement and eccentricity during rotation

Engineering Contradiction:
Improvesupporting structureVSAvoidphoto mask positioning stability
Core Design Contradiction:
Device complexityVSStability of the object's composition

Solution Approach 1:

The guide pin employs dynamics by incorporating inclined sliding portions that allow controlled movement and self-adjustment during photo mask rotation. The inclined surfaces enable the photo mask to settle into a stable position through gravitational and frictional forces while maintaining rotational stability, preventing eccentricity without requiring complex active control mechanisms.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The asymmetric inclined sliding portions create a preferred positioning orientation for the photo mask. The different inclination angles on different sides of the guide pin generate asymmetric contact forces that guide the photo mask into a stable, centered position during rotation, preventing movement and eccentricity through geometric constraint rather than symmetric support.

Inventive Principle:
Principle #4Asymmetry

Data Source

PatentUS10955758B2Guide pin, photo mask supporting unit including the same, and photo mask cleaning apparatus including the same
Publication Date: 2021.03.23 SYSTEM ENGINEERING MEGA SOLUTION CO LTD
  • US10955758B2 patent drawing
  • US10955758B2 patent drawing
  • US10955758B2 patent drawing

AI summary

Provided are a guide pin configured to support a corner of a photo mask using a double slide structure, a photo mask supporting unit including the same, and a photo mask cleaning apparatus including the same. The photo mask supporting unit includes a supporting plate, a supporting shaft which supports the supporting plate from under the supporting plate, a supporting plate driver configured to rotate the supporting plate, and a guide pin provided as a plurality of guide pins on the supporting plate to support a photo mask and including at least one column protruding upward from a flat surface and having a first sliding portion and a second sliding portion formed on a side surface of the column to be inclined downward to have different angles.