OLED Deposition Guide Rail Cooling Channel
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Solution Overview
Problem
The existing deposition methods for OLED displays face contamination and reduced lifespan due to heated grease used for reducing friction between the guide rail and slide member, leading to inefficiencies and delays in the manufacturing process.
Innovation Solution
A deposition apparatus with a cooling channel integrated into the guide rail, utilizing a refrigerant to maintain a low temperature and prevent the evaporation of fluoride-based lubricants, thereby reducing friction and contamination during the organic material deposition process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If grease is used to reduce friction between the guide rail and slide member, then friction is reduced and movement is smoother, but the heated grease evaporates and contaminates the chamber, reducing OLED lifespan
Solution Approach 1:
A cooling channel is introduced as an intermediary element within the guide rail structure. This cooling channel circulates coolant to maintain the guide rail temperature below the grease evaporation point, thereby mediating between the need for grease lubrication and the need to prevent contamination in the vacuum chamber.
Solution Approach 2:
The temperature parameter of the guide rail is actively controlled and changed from ambient or elevated temperatures to a specifically maintained low temperature (below grease evaporation temperature). This parameter change prevents grease evaporation and contamination while maintaining the lubrication function.
2Manufacturing precision
If the effusion cell moves along the guide rail during organic material evaporation, then deposition uniformity is improved, but the heated grease evaporates and contaminates the evaporation gas
Solution Approach 1:
The cooling channel acts as an intermediary thermal control system that allows the guide rail to support moving effusion cell while preventing thermal transfer that would cause grease evaporation. The coolant circulation serves as a thermal barrier between the moving components and the grease lubrication interface.
Solution Approach 2:
The temperature of the guide rail surface in contact with grease is changed and maintained below the evaporation temperature through active cooling. This enables the effusion cell to move along the guide rail during evaporation without causing grease to evaporate and contaminate the chamber.
3Productivity
If grease is continuously heated during the deposition process, then the deposition can proceed, but the grease requires frequent resupply, causing delays and inefficiencies
Solution Approach 1:
The temperature parameter of the guide rail is changed from uncontrolled or naturally elevated temperature to a controlled low temperature through the cooling channel. This parameter change extends the operational lifetime of the grease by preventing thermal degradation and evaporation, thereby reducing resupply frequency and maintaining continuous deposition productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents the degradation of device characteristics by maintaining a low temperature on the guide rail, ensuring a longer lifespan of OLED displays and enhancing manufacturing efficiency by minimizing the need for frequent grease resupply and reducing contamination.
Implementation Method 1
a cooling channel below an upper surface of the guide rail and extending in the second direction. The cooling channel may be in an interior of the guide rail
Implementation Method 2
supplying a refrigerant to a cooling channel adjacent to an upper surface of the guide rail
Data Source
AI summary
A deposition apparatus and method for depositing an organic material includes an effusion cell, a guide rail, and a cooling channel. The effusion cell extends in a first direction. The guide rail is below the effusion cell and extends in a second direction. The cooling channel is below an upper surface of the guide rail and extends in the second direction.