Gyro Sensor Adjusting Arm Leakage Vibration Cancellation
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Solution Overview
Problem
Miniaturization of gyro sensors leads to difficulties in forming fine cutting portions to suppress leakage output, resulting in degraded mechanical strength and detection sensitivity due to etching anisotropy and manufacturing variations.
Innovation Solution
Incorporating an adjusting vibrating arm with a reverse phase output to cancel out leakage vibrations, and using a support section to fix the vibrating arms, which allows for fine adjustment and suppression of unwanted mode vibrations without ultrafine cutting sections, thereby enhancing mechanical strength and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If cutting portions are formed to suppress leakage output, then detection sensitivity is improved, but mechanical strength is degraded
Solution Approach 1:
The patent extracts the leakage suppression function from the vibrating arms themselves and transfers it to a separate damping structure. The damping structure is attached to the base section and interacts with the vibrating arms to suppress leakage output, rather than modifying the vibrating arms directly with cutting portions that would weaken them.
Solution Approach 2:
The damping structure serves as an intermediary element between the base section and the vibrating arms. It mediates the leakage vibration by providing a controlled interaction point that dissipates unwanted vibrations without requiring direct modification of the vibrating arms' structural integrity.
2Volume of moving object
If miniaturization is pursued, then device size is reduced, but formation of fine cutting portions becomes difficult
Solution Approach 1:
The patent removes the manufacturing complexity of forming fine cutting portions in miniaturized vibrating arms and transfers the leakage suppression function to a separate damping structure that can be manufactured independently and attached to the base section, avoiding the need for ultra-fine features in the vibrating arms themselves.
Solution Approach 2:
The patent segments the leakage suppression function from the vibrating arm structure and implements it through a separate damping component. This allows the vibrating arms to be miniaturized without the constraint of forming fine cutting portions, as the damping function is handled by a distinct element.
3Manufacturing precision
If etching anisotropy and manufacturing variations occur, then cross-sectional shape deviates from rectangular, but vibration direction shifts causing leakage output
Solution Approach 1:
The patent converts the harmful effect of manufacturing variations and etching anisotropy into a manageable issue by using the damping structure to suppress the resulting leakage vibrations. Instead of trying to prevent the shape deviation, the damping structure is designed to handle the vibration consequences, turning the manufacturing tolerance issue into a controllable vibration suppression problem.
Solution Approach 2:
The damping structure acts as an intermediary that compensates for the effects of etching anisotropy and manufacturing variations. It provides a mechanism to suppress leakage output caused by shape deviations without requiring precise control of the vibrating arms' cross-sectional geometry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses leakage signals, maintains high mechanical strength, and achieves highly sensitive and accurate vibration detection, even in miniaturized gyro sensors, by stabilizing vibration characteristics and avoiding unwanted mode vibrations.
Implementation Method 1
an output signal of the adjusting vibrating arm has a reverse phase with respect to an output signal of a leakage vibration of the detecting vibrating arm
Implementation Method 2
a vibration gyro sensor (hereinafter referred to as a vibration gyro) as an angular velocity sensor for enhancing the vehicle body control in vehicles, the vehicle localization of car navigation systems, and the vibration control correction function (so-called image stabilization) in digital cameras and digital video cameras, and so on. The vibration gyro is a device using a gyro vibrator element formed of a piezoelectric single-crystal substance such as quartz crystal as a high-modulus material and for detecting an electric signal as an angular velocity, the electric signal being generated in a part of the gyro vibrator element due to a vibration such as a tremor or a rotation of an object
Implementation Method 3
Here, when applying the drive signal to the vibrator element to thereby cause a vibration (in-plane vibration) in a direction along the first surface in each of the vibrating arms, if the vibrator element is rotated taking an axis (e.g., the Y axis in the case of a gyro element having a quartz crystal Z plate as the substrate) in the extending direction of the vibrating arms as a detection axis, a vibration (out-of-plane vibration) in a direction perpendicular to the first surface is caused in the vibrating arms due to the Coriolis force. The amplitude of the out-of-plane vibration is proportional to the rotational speed of the vibrator element
Data Source
AI summary
A vibrator element includes a base section, a driving vibrating arm extending from one end of the base section, a detecting vibrating arm extending from another end of the base section opposite to the one end, an adjusting vibrating arm extending from the base section on an opposite side to the driving vibrating arm, and a support section extending from the base section and to be fixed to a substrate, and an output signal of the adjusting vibrating arm has a reverse phase with respect to an output signal of a leakage vibration of the detecting vibrating arm.