Gyro Sensor Bias Voltage Adjustment for Sensitivity and Noise

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Solution Overview

Problem

Existing gyro sensors face challenges in adjusting sensitivity without compromising the signal-to-noise (S/N) ratio, as increasing sensitivity leads to amplified noise.

Innovation Solution

The gyro sensor design includes a substrate, oscillation members, fixed and movable driving electrodes, fixed and movable detection electrodes, and a bias voltage application unit that adjusts the bias voltage based on stored information, allowing for sensitivity adjustment while minimizing the impact on the S/N ratio.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the gain of the sensitivity adjustment circuit is increased to achieve higher output sensitivity, then the sensitivity is improved, but noise is amplified causing deterioration of the S/N ratio

Engineering Contradiction:
Improveoutput sensitivityVSAvoidnoise
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent changes the bias voltage parameter applied to the detection electrode to adjust output sensitivity. By varying the bias voltage (e.g., from 5V to 15V as shown in the embodiment), the sensitivity is adjusted without requiring signal amplification, thereby avoiding noise amplification and maintaining a high S/N ratio.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If sensitivity adjustment is performed by amplifying the output signal, then the output sensitivity is improved, but the S/N ratio deteriorates due to amplified noise

Engineering Contradiction:
Improveoutput sensitivityVSAvoidS/N ratio
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies preliminary action by adjusting the bias voltage before signal detection and processing. By pre-adjusting the operating point through bias voltage control, the sensitivity is optimized at the source rather than through post-detection amplification, preventing noise amplification and maintaining signal quality throughout the measurement process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the gyro sensor to adjust sensitivity effectively without significantly decreasing the S/N ratio, resulting in a highly reliable electronic device and mobile apparatus operation.

Implementation Method 1

a fixed driving electrode that is fixed to the substrate and oscillates the oscillation member; a movable driving electrode that extends from the oscillation member and oscillates the oscillation member

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

a fixed detection electrode that is fixed to the substrate and detects a signal that varies according to oscillation of the oscillation member; a movable detection electrode that extends from the oscillation member and detects a signal that varies according to oscillation of the oscillation member

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 3

a bias voltage application unit that applies a bias voltage to the oscillation member; The bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit

Methodology Applied
Scientific EffectBias voltage: Electrostatics

Data Source

PatentUS9970763B2Gyro sensor, electronic device, mobile apparatus, and manufacturing method of gyro sensor
Publication Date: 2018.05.15 SEIKO EPSON CORP
  • US9970763B2 patent drawing
  • US9970763B2 patent drawing
  • US9970763B2 patent drawing

AI summary

A gyro sensor includes a substrate, an oscillation member, fixed driving electrodes and a movable driving electrode that oscillate the oscillation member, fixed detection electrodes and a movable detection electrode that detect a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member, a bias voltage application unit that applies a bias voltage to the oscillation member, and a storage unit, and the bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit.